Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Ctr Carinthian Tech Research Ag

Hiperscan Gmbh

Fraunhofer-Gessellschaft

Harald Schenk

Thilo Sandner

Alexander Wolter

Thomas Klose

Holger Conrad

Christian Drabe

Heinrich Grueger

Sergiu Langa

Matthieu Gaudet

Florenta Costache

Denis Jung

Fabian Zimmer

Christian Schirrmann

Markus Schwarzenberg

Norbert Kaiser

Bert Kaiser

Eberhard Kurth

Christian Kunath

Peter Duerr

Andreas Kenda

Heinz Kueck

Joachim Wagner

Klaus Schimmanz

Martin Blasl

Marcel Rattunde

Michael Scholles

Andreas Bergmann

Michael Stolz

Joerg Heber

Christian Gerwig

Thomas Knieling

Jörg Heber

Jan Grahmann

Ralf Ostendorf

Kirstin Bornhorst

Jan-Uwe Schmidt

Uwe Jan Schmidt

Alexandre Gatto

Minghong Yang

Wolfram Pufe

Werner Scherf

Marin Kraft

Sebastian Uhlig

A planar micromechanical actuator suspended on opposing suspension zones including a neutral axis between the opposing suspension zones, first to fourth segments into which the planar micromechanical actuator is segmented between the opposing suspension zones, each including a first electrode and a second electrode which form a capacitor and are isolatedly affixed to each other at opposite ends of the respective segment along a direction between the opposing suspension zones so as to form a gap between the first and second electrode along a thickness direction, the gap being offset to the neutral axis along the thickness direction, and wherein the first to fourth segments are configured such that the planar micromechanical actuator deflects into the thickness direction by the first and fourth segment bending into the thickness direction and the second and third segments bending contrary to the thickness direction upon a voltage being applied to the first and second electrodes of the first to fourth segments.

Micromechanical devices with mechanical actuators

A MEMS transducer for interacting with a volume flow of a fluid includes a substrate which includes a layer stack having a plurality of layers which form a plurality of substrate planes, and which includes a cavity within the layer stack. The MEMS transducer includes an electromechanical transducer connected to the substrate within the cavity and including an element which is deformable within at least one plane of movement of the plurality of substrate planes, deformation of the deformable element within the plane of movement and the volume flow of the fluid being causally correlated. The MEMS transducer includes an electronic circuit arranged within a layer of the layer stack, the electronic circuit being connected to the electromechanical transducer and being configured to provide a conversion between a deformation of the deformable element and an electric signal.

MEMS transducer for interacting with a volume flow of a fluid, and method of producing same

The invention relates to electromagnetic radiation microoptical diffraction gratings and to a method suitable for the manufacture thereof. The diffraction gratings in accordance with the invention can be used as microspectrometers in the form of scanning microgratings. The microgratings are provided with a surface structure and are able to be manufactured cost effectively and in high volumes. The surface structure is formed at a surface of a substrate and is formed from linear structural elements arranged substantially equidistantly and aligned substantially parallel to one another. At least part of the surface of the substrate and of the structural elements is coated with at least one further layer which forms a uniform sinusoidal surface contoured in a wave-shape (sinusoidal) manner and having alternating arranged wave peaks and wave troughs. A reflective layer can additionally be applied to increase the intensity of reflected radiation.

Micro-optical electromagnetic radiation diffraction grating and method for manufacture

A micromechanical device with electrostatically caused deflection by a plate capacitor extending along and spaced apart from the neutral fiber of the deflectable element is improved with regard to its manufacturing complexity and/or with regard to its operating characteristics, such as, for example, maximum voltage applicable or deflectability, by using a continuous insulation layer between the distal and proximal electrodes of the plate capacitor, or else the proximal electrode is structured so as to have gaps at the segment boundaries where the distal electrode is mechanically fixed so as to be laterally spaced apart from the distal electrode. Both procedures avoid the problems of generating a roughness of the surface of the proximal electrode facing the distal electrode, as would otherwise be necessitated by etching an insulation layer for providing spacers between the distal and proximal electrodes at the segment boundaries.

Electrostatically deflectable micromechanical device

A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.

MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same

An ion-sensitive structure includes a semiconductor structure and a layer stack disposed on the semiconductor structure having a doped intermediate layer including a doping material and a first metal oxide material. The semiconductor structure is configured to change an electric characteristic based on a contact of the ion-sensitive structure with an electrolyte including ions.

Ion-sensitive structure and method for producing the same

A micromechanically produced optical device includes:

Microelectromechanical system for tuning lasers

A fluidic variable focal length optical lens has a sealed housing having a first fluidic chamber filled with a first fluidic medium and a second fluidic chamber filled with a second fluidic medium, the first and the second fluidic chamber being separated from each other by an elastic membrane, wherein the first and the second fluidic medium have different refractive indices, and a deformator configured to deform the membrane laterally within a pump zone, thereby laterally displacing the first fluidic medium from the pump zone to a lens zone and the second fluidic medium from the lens zone to the pump zone, so that the membrane also deforms in the lens zone and changes a focal length of the lens zone along a normal direction.

Fluidic variable focal length optical lens and method for manufacturing the same

The force on the electrodes of an electrostatic field is used so that lateral tensile or compressive forces result which can deform a deformable element or can strongly deflect a deflectable structure. For this, a micromechanical device includes, apart from an electrode and a deformable element, an insulating spacer layer via which the electrode is fixed to the deformable element, wherein the insulating spacer layer is structured into several spaced-apart segments along a lateral direction, so that by applying an electric voltage between the electrode and the deformable element lateral tensile or compressive forces bending the deformable element along the lateral direction result. Thereby, the problem that normally accompanies electrostatic drives, namely the problem of the pull-in effect, is overcome. The deflection of the deformable element can be much larger than the gaps of the two electrodes, i.e. the above-mentioned electrode and the deformable element. A usage as a sensor is also possible.

Micromechanical device

Provided is a concept for variably guiding optical waves by using a layer-stack having an electro-optic core layer of electro-optic material for guiding light and an electrode arrangement with at least a first electrode layer in proximity to the electro-optic core layer, wherein the electrode arrangement is configured to activate an electro-optic effect in a region of the electro-optic core layer by an electric field generated by means of the electrode arrangement, such that a propagation of the light is manipulated in the region of the activated electro-optic effect.

Apparatus and method for guiding optical waves

A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.

Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device

The invention relates to an apparatus and to a method for controlling or regulating the deflection of micromechanically manufactured deflectable elements which, driven electrostatically, are deflected in an oscillating manner. It is the object of the invention to provide a possibility with which a much larger deflection range can be utilized and in so doing the required voltage potential difference for the electrostatic drive of a deflection can be kept small and the occurrence of the pull-in effect can be avoided. In accordance with the invention, a deflectable element is present which is held at a frame element by at least one spring element and which can be deflected using an electrostatic drive. The deflection can be achieved by means of at least one counter-electrode and the deflectable element usable as an electrode. In addition, at least one detector is present which is suitable for the contactless detection of at least one deflection position and which is connected to an electronic evaluation and control unit to influence the electrical voltage potential difference between the deflectable element and the counter-electrode(s) in dependence of a specific deflection position.

Apparatus and method for controlling or regulating an oscillating deflectable micromechanical element

The invention relates to a method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use which should be deflected at a resonant frequency. It is therefore the object of the invention to compensate deviations which occur due to manufacture and which have an influence on the resonant frequency of micromechanical elements in a simple and cost-effective manner. In accordance with the invention, a procedure is followed such that additional trenches and/or recesses are formed at the deflectable element simultaneously with the forming of the trenches by dry etching with which at least one spring element, a deflectable element and optionally also a frame element of micromechanical elements are formed. The trenches and recesses can thereby be formed under the same respective process parameters at the respective micromechanical element or at all micromechanical elements of a batch. A removal of material during etching, preferably dry etching, therefore takes place under the same etching conditions so that the respectively removed mass at trenches and/or recesses is influenced in the same manner by the etching process parameters.

Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use

In a method for manufacturing a micromechanical structure, first a two-dimensional structure is formed in a substrate. The two-dimensional structure is deflected from the substrate plane by action of force and fixed in the deflected state.

Method for generating a micromechanical structure

The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.

Oscillating, deflectable micromechanical element and method for use thereof

Growing community of inventors

Dresden, Germany

Harald Schenk