Ev Group E. Thallner Gmbh

Harald Rohringer

Thomas Wagenleitner

Thomas Plach

Boris Povazay

Dominik Zinner

Jürgen Mallinger

Jürgen Markus Süss

A device and a method for the alignment of substrates. The device includes a first substrate holder for receiving a first substrate that has at least two alignment marks, a second substrate holder for receiving a second substrate that has at least two alignment marks, at least one alignment optic for detecting the alignment marks of the first and second substrates, and at least one positioning optic for detecting positioning marks, wherein the alignment marks of the first substrate and the alignment marks of the second substrate can be aligned with one another depending on the positioning marks. The method of alignment includes the steps of fixing the first and second substrates on respective first and second substrate holders, detecting alignment marks on the substrates, detecting positioning marks, and aligning the alignment marks of the substrates with one another in dependence on the positioning marks.

Method and device for the alignment of substrates

A measuring device for determining a course of a bonding wave in a gap between a first substrate and a second substrate, and a method for determining a course of a bonding wave in a gap between a first substrate and a second substrate.

Measuring device and method for determining the course of a bonding wave

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Tumeltsham, Austria

Harald Rohringer