Plansee Se

Harald Lackner

Gerhard Dipl-Ing Leichtfried

Peter Polcik

Karl Huber

Peter Abenthung

Christian Weratschnig

A tubular target formed of molybdenum or a molybdenum alloy has an oxygen content of less than 50 &#x3bc;g/g, a density of greater than 99% of the theoretical density, and an average grain size of less than 100 &#x3bc;m. The molybdenum or molybdenum alloy tube may be produced by extrusion. In one embodiment, the molybdenum tube has a backing tube of titanium or titanium alloy. In an embodiment, the molybdenum tube has a varying wall thickness with an increase towards its ends.

Tubular target and production method

A tubular target is formed of molybdenum or a molybdenum alloy which has an oxygen content of less than 50 &#x3bc;g/g, a density of greater than 99% of the theoretical density and an average grain size of less than 100 &#x3bc;m. The molybdenum or molybdenum alloy tube may be produced by extrusion and it is formed with walls having a wall thickness that increases towards the ends of the tube. The molybdenum tube has a backing tube of titanium or titanium alloy that is attached inside with a material bond connection. Alternatively, the backing tube is formed of austenitic steel or a copper alloy.

Growing community of inventors

Reutte, Austria

Harald Lackner