Robert Boschgmbh

Harald Emmerich

Martin Schoefthaler

Ralf Schellin

Joerg Kaienburg

Markus Lutz

Jochen Reinmuth

Franz Laermer

Stefan Pinter

Kurt Weiblen

Christian Ohl

Markus Ulm

Udo-Martin Gomez

Helmut Baumann

Hans-Peter Trah

Johann Wehrmann

Dietrich Schubert

Florian Grabmaier

Mathias Reimann

Patrick Wellner

Franz Schmich

Klaus Offterdinger

Rolf Kaack

Hansjoerg Beutel

Martin Holzmann

Dirk Droste

Emma Abel

Bernd Maihoefer

An acceleration sensor has a substrate, a seismic mass and a detection unit. The seismic mass is configured to be deflected based on an external acceleration acting on the acceleration sensor, the deflection being in the form of a deflection motion with respect to the substrate along a deflection direction. The detection unit is configured to be deflected for the detection of a deflection of the seismic mass, the detection being in the form of a detection motion with respect to the substrate along a detection direction. The detection unit is connected to the seismic mass in such a way that the amplitude of the deflection motion along the deflection direction is greater than the amplitude of the detection motion along the detection direction.

Acceleration sensor and method for operating an acceleration sensor

A device for controlling a device by using a rotation-rate sensor. In order to provide a device for determining a triggering signal for a safety device which allows a particularly compact implementation of the device, the device is set up to ascertain an acceleration variable on the basis of a first sensor signal for a first seismic mass of the rotation-rate sensor and the second sensor signal for a second seismic mass of the rotation-rate sensor and to control the device as a function of the acceleration variable.

Method for controlling a device and a device for controlling the device

An acceleration sensor includes a housing, a first seismic mass which is formed as a first asymmetrical rocker and is disposed in the housing via at least one first spring, a second seismic mass which is formed as a second asymmetrical rocker and is disposed in the housing via at least one second spring, and a sensor and evaluation unit which is designed to ascertain information regarding corresponding rotational movements of the first seismic mass and the second seismic mass in relation to the housing and to determine acceleration information with respect to an acceleration of the acceleration sensor, taking the ascertained information into account. In addition, a method for operating an acceleration sensor is disclosed. The rockers execute opposite rotational movements in response to the presence of an acceleration. A differential evaluation of the signals makes it possible to free the measuring signal of any existing interference signals.

Acceleration sensor method for operating an acceleration sensor

A sensor module includes a housing and a chip system disposed therein, the chip system being disposed on a substrate and being embedded in a sealing layer deposited on the substrate. The chip system is disposed in a window region of a frame structure disposed on the substrate, the frame structure featuring substantially the same thermal expansion properties as the substrate.

Sensor module

A sensor includes a micromechanical functional part and an electronic evaluation circuit which are in electrical connection to each other using electrical conductors. An arrangement for carrying out an auto-test of the sensor is provided in such a way that fault identification of at least one electrical connection is implemented.

Micromechanical sensor having fault identification

A sensor module, in particular for measuring an acceleration or rotational speed, having a housing base body made of a plastic material, a lead frame extending through the housing base body and having leads which have connector pins for attachment to a circuit board, a sensor system having at least one sensor chip, the sensor system being in contact with the lead frame via conductor bonds, a cover, which is connected to the base body and at least one connector pin and is made of a conductive material. A simple construction having a high shielding effect is achieved due to the fact that the conductive cover is connected to the connector pin. The cover, a lid, for example, may be contacted directly via the connector pin together with the other connector pins when the components are mounted on the circuit board. The sensor module may be molded or may have a premolded housing. The edge or a contact of the cover may be welded, soldered, glued, or pressed to a ground lead of the lead frame.

A micromechanical angular-acceleration sensor having a substrate, which has an anchoring device provided on the substrate. The sensor has a ring-shaped inertial mass joined to the anchoring device by a torsion-spring device such that the anchoring device is essentially located in the center of the ring. The ring-shaped inertial mass can then be elastically displaced from its resting position, about at least one rotational axis, by the angular acceleration to be detected. The sensor has a displaceable, first capacitor-plate device attached to the ring-shaped inertial mass, and a stationary, second capacitor-plate device attached to the substrate. The first and the second capacitor-plate devices are designed as a differential-capacitor device for detecting one of the parameters indicating the angular acceleration about the rotational axis.

Micromechanical spin angular acceleration sensor

A micromechanical cap structure and a corresponding manufacturing method are described, the cap structure having a substrate, in particular in the form of a wafer, having a cavity made therein. The cavity includes a bottom surface and two pairs of opposite parallel side wall sections. The cavity has at least one stabilizing wall section, which connects two side wall sections. This considerably increases the stability of the cap structure.

Micromechanical cap structure and the respective manufacturing method

A sensor element, in particular for determining an angle of rotation, has a detection medium whose position varies as a function of a change in a parameter to be measured, where the change in the position of the detection medium leads to a change in an analyzable signal of the sensor element which is influenced by the detection medium. The detection medium has at least one conductor loop carrying current which is exposed to an external magnetic field; the detection medium is rotationally movably mounted so that a rotational motion of the sensor element about an angle of rotation in the plane of the magnetic field is converted into a deflection of the detection medium perpendicular to the magnetic field.

Sensor element

A micromechanical magnetic field sensor includes a printed circuit trace device, which is suspended above a substrate and is capable of being deflected elastically. Also included are a first capacitor plate device that is joined to the printed circuit trace device and is able to be deflected together with the printed circuit trace device, and a second, fixed capacitor plate device that is joined to the substrate and forms a capacitor device by interacting with the first capacitor plate device. A magnetic field sensing device conducts a predetermined current through the printed circuit trace device and measures the change in capacitance of the capacitor device arising in dependence on an applied magnetic field. The magnetic field sensing device can also be designed in such a way that it can be calibrated by calibration current loops.

Growing community of inventors

Kusterdingen, Germany

Harald Emmerich