Hefei University of Technology

Haojie Xia

Liandong Yu

Wei Zhang

Jie Wang

Hongli Li

Xinyang Liu

Liling Han

Fangfang Liu

Huaxia Deng

Xin Ran

Wei Zhou

Weishi Li

Huining Zhao

Chengliang Pan

Siying Lu

Xiaoying Hou

A measurement system for detecting deep-hole surface topography based on low-coherence interferometry (LCI) can include a detection part and an autocollimation system. The detection part includes a white light interferometric system, which specifically includes a 1550 nm amplified spontaneous emission (ASE) broadband light source, a first reflector, a first beam splitting prism, a second reflector, and a reference reflector that are arranged in sequence, where a to-be-measured deep-hole and a near-infrared camera are respectively arranged at two sides of the first beam splitting prism, and a conical prism is disposed inside the to-be-measured deep-hole. The autocollimation system is disposed between the to-be-measured deep-hole and the first beam-splitting prism. The autocollimation system includes a 630 nm light source, a dichroic prism, a second beam-splitting prism, a third reflector, and a quadrant detector that are arranged in sequence.

Measurement system for detecting deep-hole surface topography based on low-coherence interferometry

A micro-displacement measurement system having a picometer scale resolution and a measurement method. The measurement system comprises a probe module, a demodulation optical path module, a static lock-in amplification module, an upper computer module, and a micro-displacement drive module. The probe module comprises a measurement FBG sensor, a matching FBG sensor, a precision stainless steel needle tube, and an external support; the demodulation optical path module comprises an ASE broadband light source, a first circulator, a second circulator, and an InGaAs photodetector; the upper computer module comprises a data acquisition card and a computer; and the micro-displacement drive module comprises a piezoelectric ceramic nano-positioner, a piezoelectric ceramic driver, a three-dimensional precision micro-motion platform.

Micro-displacement measurement system having picometer scale resolution and measurement method

A micro inchworm-type piezoelectric-driven rotating joint mechanism includes a U-shaped base, bearing pedestals, bearing brackets, bearing rings, piezoelectric ceramic plates, a rotating shaft, a rotating sleeve and end caps. Every bearing ring is divided into two half-rings which are coupled to the bearing pedestals via two bearing brackets. One end of every piezoelectric ceramic plate is fixed to one bearing pedestal, and the other end thereof is coupled to one bearing ring, so that every piezoelectric ceramic plate stretches and deforms under the driving of voltage for driving the bearing ring to achieve micro motions. Two bearing driving modules are respectively symmetrically mounted at two sides of the U-shaped base, and the rotating shaft is supported on the two bearing rings, so that the stepping motion of the rotating shaft is implemented by controlling the timing sequence of clamping, release and rotation of the two bearing driving modules.

Micro inchworm-type piezoelectric-driven rotating joint mechanism

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Anhui, China

Haojie Xia