Hua Hong Semiconductor (wuxi) Limited

Wuxi Fortune Pharmaceutical Co., Ltd

Hao Wu

Bin Han

Xudong Li

Qiyi Yang

Fei Wang

Peng Li

Jian Li

Shuhui Chen

The disclosure discloses a resistance test method using a Kelvin structure, which includes the following steps: step 1: providing a Kelvin test structure including a tested resistor, a first parasitic resistor, and a second parasitic resistor connected in series; step 2: applying first current to the two current test terminals and simultaneously testing first voltage in the two voltage test terminals; step 3: applying second current in a direction opposite to the direction of the first current to the two current test terminals and simultaneously testing second voltage in the two voltage test terminals; step 4: dividing a difference value obtained by subtracting the second voltage from the first voltage by a difference value between the first current and the second current to obtain the final test value of the tested resistor. The disclosure can reduce the resistance test error.

Resistance test method using kelvin structure

Growing community of inventors

Wuxi, China

Hao Wu