Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Taiwan Semiconductor Manufacturing Comp. Ltd. (2 from 40,635 patents)
2 patents:
1. 11043573 - Method of fabricating tantalum nitride barrier layer and semiconductor device thereof
2. 10147799 - Method of fabricating tantalum nitride barrier layer and semiconductor device thereof