Inficon Gmbh

Hansjakob Hanselmann

Martin Wüest

Per Björkman

Urs Wälchli

Heikki Saari

Jarkko Antila

Stanislav Duris

Claudio Christoffel

Antila Jarkko

The invention relates to a vacuum measuring cell device comprising a vacuum membrane measuring cell () having a connecting means () arranged thereon for a communicating connection to the medium to be measured, an electronic system (), which is electrically connected to the vacuum membrane measuring cell (), and also comprising a heating arrangement () for heating the vacuum membrane measuring cell () to a predefinable temperature value, wherein the heating arrangement () substantially encloses the entire vacuum membrane measuring cell () such that said cell forms a thermal container (). Said container constitutes a thermal body () in the area of the connecting means () and connecting means () are guided through it, the connecting means thereby being thermally contacted at least in some areas by the thermal body. The thermal container () comprises a heating source () for the heating thereof. The thermal container () is substantially entirely enclosed by an insulating shell ().

Vacuum measuring cell device having a heater

A manufacturing method for a vacuum measuring cell provides first and second AlOceramic or sapphire housing bodies on opposite sides of an AlOceramic or sapphire membrane sealed to the bodies at its opposite peripheral edges. A reference vacuum chamber and a measuring vacuum chamber are on opposite sides of the membrane. An optical transparent window is provided in the first housing body and an optically reflective material is provided on a central region of the membrane. A lens is above the optical transparent window for optically linking to the optically reflective material on the membrane and an optical fiber outside the reference vacuum chamber and at a distance from the optical transparent window feeds light through the lens and window and in and out onto the optically reflective material on the membrane so that the level of membrane deflection is detected by a Fabry-Perot Interferometer.

Optical interferometric pressure sensor manufacturing method

A shield arrangement for a vacuum measuring cell has a tubular shield housing encompassing a shield and an exit port for connection to a vacuum measuring cell and a connection opening for the object space to be measured. The shield is between the two openings and is implemented as a screw shield with spiral convolutions, its thread flange in the outer diameter being in contact on the inner wall of the shield housing such that a gas throughflow between the outer diameter of the thread flange and the inner wall is inhibited and is substantially forced into the spiral thread flight, and the exit port is on one side of the tubular section and the connection opening is on the other, opposite side and the screw shield is implemented such that in the axial line of vision the shield arrangement between the two openings is optically tight.

Shield arrangement for a vacuum cell

A vacuum measuring cell has a first housing body and a membrane, both of AlOceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second housing body of AlOceramic or sapphire opposite the membrane, is joined to the peripheral edge of the membrane by a second seal to form a measurement vacuum chamber. A port connects the vacuum measuring cell to a medium to be measured. At least in the central area of the first housing body, an optical transparent window is formed and at least the central region of the membrane has an optically reflective surface. Outside the reference vacuum chamber, in opposition to and at a distance from the window, an optical fibre is arranged for feeding in and out light onto the surface of the membrane.

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Oberschan, Switzerland

Hansjakob Hanselmann