Deutschetelekom Ag

Other

Sandia Corporation

Nawotec Gmbh

Hans Wilfried Koops

Wolfgang Dultz

Gerald Meltz

Klaus Edinger

Thorsten Hofmann

Shawn-Yu Lin

Sergey Babin

Petra Spies

Erna Frins

Sergey Babine

Ulrich Koops

Manfred Eich

Gerhard Hanke

A method for etching a chromium layer in a vacuum chamber which may comprise introducing a halogen compound into the vacuum chamber, directing an electron beam onto the area of the chromium layer to be etched and/or introducing an oxygen including compound into the vacuum chamber. A further method for the highly resolved removal of a layer out of metal and/or metal oxide which may be arranged on an isolator or a substrate having poor thermal conductivity, may comprise arranging the layer inside a vacuum chamber, bombarding the layer with a focused electron beam with an energy of 3-30 keV, wherein the electron beam may be guided such that the energy transfer per time and area causes a localized heating of the layer above its melting and/or vaporization point and wherein the removal of the layer may be performed without the supply of reaction gases into the vacuum chamber.

Method for high-resolution processing of thin layers using electron beams

In an apparatus for the input of information, it is provided that a raster or an array of light-emitting screen elements is associated with a raster or an array of photodetectors, the light emitted by at least one of the screen elements being reflected to at least one of the photodetectors when an object approaches the apparatus; it is further provided that output signals of the photodetectors are used to obtain information on which of the photodetectors are receiving reflected light.

Device for inputting data

In a device for optical coupling of a solid-state laser to an optical fiber, an anamorphic lens system is arranged between the output face of the solid-state laser and the input face of the optical fiber, the lens system converting differing apertures in the main sections of the solid-state laser into essentially identical apertures at the input face of the optical fiber. The lens system is composed of one anamorphic lens applied on the output face and a further lens applied on the input face.

Device for optical coupling of a solid-state laser with an optical wave guide and a process for their production

An integrated optical circuit is described. The optical circuit includes a silicon substrate and waveguides disposed thereon, at least one photonic crystal is provided as a waveguide.

Integrated optical circuit

A process for the fabrication of polymer layers structured in three dimensions, such as of lenses, which are applied to the end of optical fibers or of laser light sources. Dry resist that is polymerizable through exposure is used as a base substance. The dry resist is applied to a substrate and is exposed with a dose apportionment that is predefined as a function of space and time in a structure region. The structure region is precalculated with submicrometer precision using image-processing methods and exhibits the form of the desired lens. The lens-shaped structure region that is polymerized through exposure is removed from the unexposed dry resist. The process of the present invention makes it possible to place lenses on an optical fiber or a laser with submicrometer precision.

Process for fabricating three-dimensional polymer layer structures

A telecommunication system having frequency-dividing optical components where light pulses having different frequencies are coupled out of a optical fiber by fiber grating and/or photonic crystals and imaged by focusing elements outside of the optical fiber. The fiber grating for different frequencies can be used in a single period or in different periods disposed one after the other. The photonic crystals can be used at the optical fiber extremity or etched in a channel or trench in a glass fiber. Delay elements are added to ensure that different frequency light pulses are imaged simultaneously in a given and desired time relation as required for further parallel processing.

Telecommunication system having frequency-dividing optical components for the parallel processing of optical pulses

A photonic crystal device and method. The photonic crystal device comprises a substrate with at least one photonic crystal formed thereon by a charged-particle beam deposition method. Each photonic crystal comprises a plurality of spaced elements having a composition different from the substrate, and may further include one or more impurity elements substituted for spaced elements. Embodiments of the present invention may be provided as electromagnetic wave filters, polarizers, resonators, sources, mirrors, beam directors and antennas for use at wavelengths in the range from about 0.2 to 200 microns or longer. Additionally, photonic crystal devices may be provided with one or more electromagnetic waveguides adjacent to a photonic crystal for forming integrated electromagnetic circuits for use at optical, infrared, or millimeter-wave frequencies.

Photonic crystal devices formed by a charged-particle beam

One or more photonic crystals 11, 22, 40, 58, 59 are formed directly in the path of light within an optical fiber 13, 23, 42, 56. Light processed by the photonic crystal may be transmitted out of the fiber by means of a lens 48 or it may be measured by a photoresistive device 51, 60. The photonic crystal may be formed in a trench 12 as an array of dielectric rods 16 having one or more selective defects 17, or the crystal may be formed by providing holes 20 directly in the optical fiber. Filling the interstices between rods 16 with non-linear optical material, and subjecting the crystal to a varying electric field applied by electrodes or to a varying optical radiation can produce a tunable photonic crystal within an optical fiber.

In-fiber photonic crystals and systems

Optical multi-channel separating filter with electrically adjustable

A microlens 30 is formed on the outer surface of an optical fiber 20 having an in-fiber Bragg grating 24 (FBG) formed in the core 21, 36 thereof, to focus light diffracted by the FBG onto other fibers or optical devices, or to focus light received at the fiber onto the FBG. Various single- and multi-microlens configurations of one or more fibers perform a variety of functions such as signal coupling, multiplexing, signal splitting, spectrography, tapped delay, timed-delay phase adjusting, circulating storage, and so forth. The microlenses may employ angle-increasing prisms and may comprise Fresnel lenses.

Fiber-integrated microlenses and optical fiber FBG couplers,

A method for mechanically stabilizing and for tuning a filter having a photonic crystal structure The cavities of the filter fabricated as a photonic crystal structure are filled with optically transparent material having an adjustable refractive index. The optical properties of the filter and, thus, the filtering action are adjusted by way of an electric field having a variable field strength. It is possible to produce small-dimensioned, narrow-band filter elements, which are finely tunable and tunable within a broad range, and to realize them as filter elements which are integrated with a high packaging density.

Method for the mechanical stabilization and for tuning a filter having a

A digital memory element having three miniaturized electron tubes, which is faster and smaller by at least one further order of magnitude than known digital memory elements, can be produced through conventional and additive lithography. The digital memory element is a small memory capacitor linked to the anode of a write-in tube, to the cathode of an erase tube, and to a deflection element of a read-out tube which deflects an electron beam, in dependence upon the charge state, to one of two detectors.

Growing community of inventors

Ober-Ramstadt, Germany

Hans Wilfried Koops