Leybold Aktiengesellschaft

Leybold Vakuum Gmbh

Hans-Ulrich Hafner

Uwe Timm

Hans-Joachim Forth

Hans-Hermann Klein

Dieter Sous

Christoph Heiden

Hans-Jurgen Mundinger

Gunter Thummes

Gerd Flick

The invention relates to a multistage low-temperature refrigeration machine with a first stage in the form of a displacer refrigerator (,) as well as at least one further stage in the form of a pulse tube refrigerator (,); in order to suppress vibrations it is proposed that a flexible component (,) designed to prevent the spread of vibrations be placed between the displacer refrigerator (,) and the pulse tube refrigerator (,).

Multistage low-temperature refrigeration machine

Low-temperature refrigerator with cold head and a process for optimizing

Cryopump and process for regenerating said cryopump

A two-stage cryopump having a refrigerator including a first stage and a second stage being colder than the first stage; a condensation member having a condensation surface; a first coupler for connecting the condensation member to the second stage in a thermally conducting manner; an adsorption member having an adsorption surface and being spaced from the condensation member; and a second coupler for connecting the adsorption member to the second stage in a heat conducting manner. There is further provided a heater for heating the adsorption member during time periods for regenerating the adsorption member. The second coupler is so designed that it thermally sufficiently insulates the adsorption member from the second stage and from the condensation member at least during heating periods of the adsorption member, for preventing heating the condensation member by the heater.

Two-stage cryopump

The invention relates to a method of adapting a twostage refrigerator cryopump to a specific gas; the cryopump includes a first cooling stage to which pump surfaces are fastened and which is equipped with a heating device; the cryopump further includes a second cooling stage to which pump surfaces are fastened and which, during operation, takes on a temperature of up to 20 K. In order to enable the pump to perform at an optimum level for gases having different vapor pressures, it is proposed to control the heating device in such a manner that the coldest location of the first cooling head or, more precisely, of its pump surfaces, has a temperature which is higher by 5 to 10 K than the vapor pressure temperature of the respective gas associated with the maximum process pressure.

Method of adapting a two-stage refrigerator cryopump to a specific gas

Growing community of inventors

Cologne, Germany

Hans-Ulrich Hafner