Robert Boschgmbh

Trumpf Photonic Components Gmbh

Hans Spruit

Philipp Henning Gerlach

Robert Wolf

Robert Weiss

Matthias Falk

Alexander Marc Van Der Lee

Joachim Wilhelm Hellmig

Pieter Hoeven

Alexander Van Der Lee

Jeroen Dragt

A method reduces false-positive particle counts detected by an interference particle sensor module, which has a laser and a light detector. The method including: emitting laser light; providing a high-frequency signal during the emission of the laser light, a modulation frequency of the high-frequency signal being between 10-500 MHz; detecting an optical response by the light detector in reaction to the emitted laser light while providing the high-frequency signal, which is arranged such that a detection signal caused by a macroscopic object positioned between a first and second distance is reduced in comparison to a detection signal caused by the macroscopic object at the same position without providing the high-frequency signal. The high-frequency signal is provided to a tuning structure of the particle sensor module which is arranged to modify a resonance frequency of an optical resonator comprised by the laser sensor module upon reception of the high-frequency signal.

Method of reducing false-positive particle counts of an interference particle sensor module

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Ulm, Germany

Hans Spruit