Leybold Vakuum Gmbh

Leybold Aktiengesellschaft

Hans-Rudolf Fischer

Heinrich Engl&auml;nder

Christian Beyer

Gunter Schutz

Markus Henry

Ralf Adamietz

Gerhard Wilhelm Walter

Wilhelm Walter

Alexander Bosma

Friedrich Schulz-Hausmann

A molecular vacuum pump ( ) includes a stator unit ( ) which has a stator blade package including one or more rows of stator blades ( ), and a rotor unit ( ) which has rotor blade package including one or more rows of rotor blades ( ). The rotor blades ( ) and the state blade ( ) intermesh with each other in the functionally assembly state. The rotor blades ) include slots ( ) whose arrangement, depth and width are selected such that the stator unit ( ) and the rotor unit ( ) may be screwed together or unscrewed from one another. Alternatively, the stator blades ( ) include slots ( ) whose arrangement, depth and width are selected such that the stator unit ( ) and the rotor unit ( ) may be screwed together or unscrewed from one another.

Friction vacuum pump with a stator and a rotor

The invention relates to a friction vacuum pump ( ) with a stator ( ) and a rotor ( ), which form at least two pump stages ( ) with one gas inlet ( ) each, as well as with junction for the pump stages, which are equipped with junction openings ( ) and serve for the connection of the gas inlets ( ) of the pump stages with devices to be evacuated; in order to avoid high conductance losses it is proposed that the junction openings ( ) are located in a plane which is disposed laterally adjacent to the pump stages ( ) such that the distance between the junction openings ( ) and the rotor axis ( ) is of minimum feasible size.

Vacuumtight connection

Growing community of inventors

Erftstadt, Germany

Hans-Rudolf Fischer