Centrotherm Photovoltaics Ag

Centrotherm Thermal Solutions Gmbh+co.kg

Hans-Peter Voelk

Harald Wanka

Johann Georg Reichart

Robert Michael Hartung

Dieter Schmid

A method and device for separation of chalcogens from waste gases in process installations are provided so that complete and reliable removal of chalcogens occurs continuously during nonstop operation of the process installation in the most effective manner possible. The process installation is connected via a pipeline to an input connector of the device for separation of chalcogens arranged outside of the process installation. The pipeline and the input connector have a heat connection to the process chamber. The device for separation of chalcogens is provided with an outlet connector as well as a gas outlet is equipped with a cooling device so that the input connector is excluded from cooling.

Method and apparatus for depositing chalcogens

The invention relates to a plasma reactor with high productivity for surface coating or modification of objects and/or substrates by plasma processes in a processing chamber, preferably as vacuum processes at reduced pressure, having an entrance lock to the processing chamber and an exit lock. The invention is to create a plasma reactor of high productivity, which, with uniformly high productivity, will make possible a rapid simple and selective cleaning of the plasma sources and adjacent parts of the processing chamber. According to the invention, two plasma sources () are provided, each alternately couplable to a reaction chamber () or a re-etching chamber (). The plasma sources () are fixed for this purpose to an alternating means () in such manner that the plasma sources () are positionable by a rotatory motion of the alternating means () in the reaction chamber () or the re-etching chamber ().

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Griesingen, Germany

Hans-Peter Voelk