Applied Materials, Inc.

The Boc Group, Inc.

Hans Peter Theodorus Ceelen

Richard L Newcomb

An apparatus and method for coupling utilities is provided. In one embodiment, an apparatus for coupling utilities comprises a lower plate supported by a box, the plate having an aperture, at least one preloaded spring, at least one utility connection component, and a primary alignment pin projecting from a first surface of the plate; and an upper plate having a secondary alignment pin shorter than the primary alignment pin projecting from a first surface of the upper plate, an aperture and at least one utility connection component. The upper plate can move toward the lower plate with the first surfaces of the plates facing one another so that the primary alignment pin passes through the aperture in the upper plate and the secondary alignment pin passes through the aperture in the lower plate, the at least one preloaded spring is compressed, and the plates engage, coupling the utility connection components.

Self-aligning utility autocoupler

An arrangement of magnets and stacks of magnets has been developed for use in magnetron sputtering devices. The arrangement may include commercially available or easily manufactured magnets. The arrangement may also include magnetic shunts to tune the magnetic field. The arrangements may be potted to provide protection from the environment, and may be incorporated into a system for cooling the magnets and target. When used in a magnetron sputtering device, the arrangement provides a magnetic field that results in nearly uniform sputtering over most of the target area. Further, the magnet arrangement provides target utilization values that are significantly higher than those provided by prior art magnet systems. Thus, the present invention also provides a method of arranging magnets for optimal performance and a method for improving target utilization.

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Rio Vista, CA, United States of America

Hans Peter Theodorus Ceelen