Centrotherm International Ag

Hans-Peter Elser

Thomas Pernau

Peter Völk

Reinhard Lenz

Wolfgang Jooss

Moritz Vogt

Olaf Romer

Andreas Reichart

Wolfgang Scheiffele

Matthias Tumback

The invention relates to methods and an apparatus for passivating defects of a semiconductor substrate, in particular a silicon based solar cell. According to the method, the substrate is irradiated with electromagnetic radiation during a first process phase, wherein the radiation directed onto the substrate has wavelengths at least in the region below 1200 nm and an intensity of at least 8000 Watt/m2. This can lead to a heating of the substrate, or a temperature control can be provided. Subsequently, the substrate is irradiated with electromagnetic radiation during a temperature-holding phase following the first process phase, wherein the radiation directed onto the substrate has wavelengths primarily in the region below 1200 nm and an intensity of at least 8000 Watt/m2, while a side of the substrate facing away from a source of the electromagnetic radiation is cooled via a contact with a support cooled by a cooling device.

Method and device for passivating defects in semiconductor substrates

A cooling module for cooling substrates, in particular solar cells having a paste printed thereon after passing through a heating module is described. The cooling module comprises an elongated cooling chamber having an inlet opening, which is adjacent to a heating module, and an outlet opening, as well as a transport unit for transporting substrates through the elongated cooling chamber, wherein the transport unit defines a transport plane for the substrates. At least one first cooling unit is provided. The cooling unit has a plurality of first plate elements, which are arranged in substance perpendicular to and above the transport plane in the cooling chamber, at least one first conduit which extends through the first plate elements and is in a thermally conducting relationship therewith, and at least one conveying unit for conveying a cooling fluid through the first conduit. A conveying unit for conveying gas, in particular air, via spaces between the plate elements towards the transport plane is also provided. Also, an apparatus for thermally treating substrates, in particular solar cells, having a paste printed thereon is described. Said apparatus comprises a heating module having an elongated heating chamber and at least one adjacent cooling module having an elongated cooling chamber. A transport unit for transporting that substrates through the heating chamber and the cooling chamber is provided, wherein the transport unit comprises a revolving, gas permeable transport belt, which forms a transport section and a return section. The transport section extends through the heating chamber and the cooling chamber, while the return section has a portion which extends through at least a portion of the cooling chamber and wherein the return section is arranged outside of the heating chamber.

Cooling module and apparatus for thermally treating substrates

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Ulm, Germany

Hans-Peter Elser