Leybold Systems Gmbh

Leybold Aktiengesellschaft

Hans Neudert

G&uuml;nter Klemm

Wolfgang Achtner

Bernd Wolf

Juergen Mueller

A method and apparatus for vapor depositing a release agent on a foil. The foil is wrapped around a cylindrical drum which is made of a porous material. The hollow inside of the drum forms a vapor space. The outer surface of the drum includes a thin metallic layer which has engraved or etched therein a pattern of surface passages. A vaporizer vessel provides a vaporized release agent which is conducted to the vapor space inside the drum. The release agent travels through the circumferential passages so as to be deposited in a pattern on the foil which is wrapped around the drum. A conforming body covers the circumferential surface not covered by the foil and can be heated to heat the drum.

Vapor deposition apparatus

A metallizing device for vacuum metallizing arrangements is disclosed having a vaporizer (,) heated by an electrical heating rod (,). This vaporizer (,) is connected to a nozzle element (,) in the form of a hollow body. For the purpose of vaporizing a substrate, vapor flows out of the vaporizer (,) into the nozzle element (,) and from there out of a nozzle gap (,) toward the substrate.

Metallizing device for vacuum metallizing

In a cathode system for coating a substrate (46), having a cathode which is connected to a direct-current and/or alternating-current source (high-frequency source) and is disposed in an evacuable coating chamber (2), and is electrically connected to a target (29) which is sputtered and whose sputtered particles deposit themselves on the substrate, a process gas is brought into the coating chamber. The cathode is formed from a substantially pot-like housing (3) whose solid bottom (39) is fixedly joined to the target (29) and whose open end facing away from the target (29) is sealingly held in an opening (49) in the outer wall (30) of the coating chamber such that the interior (49) of the housing (3) is exposed to atmospheric pressure, while the target (29) and the outer surface of the shell-like part of the housing (3) joined thereto are affected by the pressure prevailing in the coating chamber.

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Freigericht, Germany

Hans Neudert