Schott Ag

Carl-zeiss-smt Ag

Hans Morian

Udo Dinger

Ina Mitra

Martin Weiser

Frank Eisert

Konrad Knapp

There is provided a substrate material for an optical component for X-rays of wavelength &#x3bb;. The substrate includes (a) a glass phase made of amorphous material having a positive coefficient of thermal expansion, and (b) a crystal phase including microcrystallites having a negative coefficient of thermal expansion and a mean size of less than about 4 &#x3bb;. The substrate material has a stoichiometric ratio of the crystal phase to the glass phase such that a coefficient of thermal expansion of the substrate material is less than about 5&#xd7;10Kin a temperature range of about 20 &#xb0;C. to 100&#xb0;C. The substrate material, following a surface treatment, has a high spatial frequency roughness (HSFR) of less than about &#x3bb;/30 rms.

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Schlangenbad, Germany

Hans Morian