Carl Zeiss Microscopy Gmbh

Hans Mathèe

Josef Biberger

Ralph Pulwey

Michael Steigerwald

Jaroslaw Paluszynski

Dietmar Doenitz

A method of processing of an object comprises scanning a particle beam across a surface of the object and detecting electrons emerging from the object due to the scanning; determining a height difference between the surface of the object and a predetermined surface for each of plural of locations on the surface of the object based on the detected electrons; determining a processing intensity for each of the plural locations on the surface of the object based on the determined height differences; and directing a particle beam to the plural locations based on the determined processing intensities, in order to remove material from or deposit material on the object at the plural locations.

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Heidelberg, Germany

Hans Mathèe