Jettec Ab

Excillum Ab

Hans Martin Hertz

Oscar Hemberg

Lars Rymell

Magnus Berglund

Tomi Tuohimaa

Mikael Otendal

Lars Malmqvist

Jakob Christer Larsson

Björn Hansson

Göran Johansson

Jaco De Groot

Bj&ouml;rn Am Hansson

Carmen Mihaela Vogt

Oscar &Hcirc;emberg

Ulf Lundström

Mikaél Otendal

Hans Daniel Larsson

Björn A M Hansson

The disclosure provides improvements of resolution and contrast in the field of x-ray imaging by using a line emitting, quasi-monochromatic x-ray source for x-ray fluorescence computed tomography. A particular type of x-ray source suitable for this is a line emitting liquid-jet-anode x-ray source. X-ray fluorescence is obtained using nanoparticles, preferably coated nanoparticles with a metallic core. The x-ray radiation from the x-ray source is shaped and filtered using energy dispersive optics before being delivered to the nanoparticles.

X-ray micro imaging

A self-cleaning X-ray window arrangement is provided that includes a primary X-ray-transparent window element, separating an ambient pressure region from an intermediate region, and a secondary X-ray-transparent window element, separating the intermediate region from a reduced pressure region. A contaminant is expected to deposit on a side of the secondary element facing the reduced pressure region. A heat source is adapted to heat a portion of the secondary window element thereby evaporating contaminant. The secondary element shields the primary element from the reduced pressure region, in which contaminant is present, whereas the pressure-tight primary window element carries most of the differential pressure between the ambient pressure region and the reduced pressure region. Several features help to decrease the rate at which contaminant enters the intermediate region. By maintaining the pressure in the intermediate region close to the reduced pressure, the mechanical stress on the secondary window element can be limited as well as the exposure to harmful gases.

X-ray window

A method for generating x-ray radiation, comprising the steps of forming a target jet by urging a liquid substance under pressure through an outlet opening, the target jet propagating through an area of interaction; and directing at least one electron beam onto the target jet in the area of interaction such that the electron beam interacts with the target jet to generate x-ray radiation; wherein the full width at half maximum of the electron beam in the transverse direction of the target jet is about 50% or less of the target jet transverse dimension. A system for carrying out the method is also disclosed.

Debris reduction in electron-impact X-ray sources

A method of producing a radiating plasma with an increased flux stability and uniformity is disclosed. The method comprises the steps of generating a primary target by urging a liquid under pressure through a nozzle; directing an energy pre-pulse onto the primary target to generate a secondary target in the form of a gas or plasma cloud; allowing the thus formed secondary target to expand for a predetermined period of time; and directing a main energy pulse onto the secondary target when the predetermined period of time has elapsed in order to produce a plasma radiating X-ray or EUV radiation. The pre-pulse has a beam waist size that is larger, in at least one dimension, than the corresponding dimension of the primary target.

Method and arrangement for producing radiation

A method and an arrangement for generating x-ray or EUV radiation are disclosed. Target material is supplied from a container for target material to a jet-forming orifice in an interaction chamber by means of a flexible capillary tubing of considerable length, wherein the orifice is an integral part of the capillary tubing. A jet formed by urging target material through the orifice is made to interact with a beam of energy, thus producing a radiating plasma emitting the desired electromagnetic radiation. The use of a flexible capillary tubing for supplying target material from a source of target material to an orifice, which is integrated with the tubing, within an interaction chamber, in order to form therein a jet of target material for interaction with an energy beam to generate x-ray or EUV radiation, is also disclosed.

Capillary tubing

In a method of generating X-ray or EUV radiation, a substance is urged through an outlet to generate a jet in a direction from the outlet, at least one energy beam is directed onto the jet, the energy beam interacting with the jet to generate the X-ray or EUV radiation, and the temperature of the outlet is controlled, such that the stability of the jet is improved. An apparatus is also disclosed.

Method and apparatus for generating X-ray or EUV radiation

In a method and an apparatus for generating X-ray or EUV radiation, an electron beam is brought to interact with a propagating target jet, typically in a vacuum chamber. The target jet is formed by urging a liquid substance under pressure through an outlet opening. Hard X-ray radiation may be generated by converting the electron-beam energy to Bremsstrahlung and characteristic line emission, essentially without heating the jet to a plasma-forming temperature. Soft X-ray or EUV radiation may be generated by the electron beam heating the jet to a plasma-forming temperature.

A method for generating X- or EUV-radiation via laser plasma emission, in which at least one target (17) is generated in a chamber, and at least one pulsed laser beam (3) is focused on the target in the chamber. The target is generated in the form of a jet (17) of a liquid, and the laser beam (3) is focused on a spatially continuous portion of the jet (17). An apparatus for generating X- or EUV-radiation via laser plasma emission according to the method comprises a means for generating at least one laser beam (3), a chamber, a means (10) for generating at least one target (17) in the chamber, and a means (13) for focusing the laser beam (3) on the target (17) in the chamber (8). The target-generating means (10) is adapted to generate a jet (17) of a liquid. The focusing means (13) is adapted to focus the laser beam (3) on a spatially continuous portion of the jet (17).

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Stocksund, Sweden

Hans Martin Hertz