Logitex Reinstmedientechnik Gmbh

Hans Lettner

Ernst Georg Frisch

G&uuml;nther Schindler

Xaver Kollmer

The invention relates to a monitoring system for a conveying device for flat articles, especially wafers, which conveying device is provided with a carriage ( ) that is movable along a predetermined path next to a flat article ( ) that is located at a predetermined removal location, the carriage having a receiving device for the accommodation of the flat article ( ), which monitoring system contains a light source ( ) having a light-exit window and a light receiver ( ) having a light-admission window, whereby the light-exit window and the light-admission window are positioned in such a way that a light beam ( ) directed form the light-exit window to the light-admission window is partially covered by the carriage ( ) during its movement through the light beam, and an evaluation unit that is connected to the light receiver and that compares a target signal derived from its movement of the carriage along a target path with an actual signal derived from an actual movement of the carriage, and indicates a deviation.

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Landskron, Austria

Hans Lettner