Tui Laser Ag

Tuilaser

Hans Kodeda

Claus Strowitzki

Helmut Frowein

Alexander Hohla

A laser discharge unit is provided. The discharge unit includes an elongated electrode plate, an elongated high voltage electrode, and an elongated ground electrode. Both the high voltage electrode and the ground electrode are mounted to the electrode plate in a spaced-apart relationship with their longitudinal axis being substantially parallel to thereby define a gas discharge gap between the electrodes. The gas laser discharge unit may be removably mounted as a module into a gas laser such as an excimer laser.

Modular gas laser discharge unit

An optical element holding and extraction device is provided. The device includes an optical element, an optical element holder having a tubular gripping portion and a tubular extraction portion connected at one end to the tubular gripping portion, and a retainer that is slideably carried on the tubular extraction portion. The diameter of the tubular extraction portion is less than the tubular gripping portion. In addition, the tubular gripping portion grips the peripheral edge of the optical clement. The device may be used in a variety of gas lasers, including excimer lasers.

Optical element holding and extraction device

A gas laser discharge unit is provided. The discharge unit includes an elongated electrode plate having a plurality of spaced-apart holes therein and a plurality of coaxial high voltage ducts. Each duct extends through one of the holes in the electrode plate and includes a central conductive core and an insulator element arranged around the core to electrically insulate said core from the electrode plate. An elongated high voltage electrode is electrically connected to the cores of the ducts. In addition, an elongated ground electrode is positioned to oppose the high voltage electrode and form a gas discharge gap therebetween. The ground electrode is electrically connected to the electrode plate. The gas laser discharge unit may be removably mounted as a module into a gas laser tube, such as an excimer laser tube.

Gas laser discharge unit

An adjustable mounting unit for an optical element of a gas laser is provided. The typical gas laser for which the mounting unit will be used comprises a tube having a first end wall at one end and a second end wall at the other end, an optical axis extending longitudinally through the tube, and a port in the first end wall through which the optical axis passes. The mounting unit includes a rigid support structure having an aperture therein and an optical element mounted within the aperture. In addition, at least three adjustable mounting devices are used to attach the support structure to the laser tube. The mounting points are preferably selected so that they are displaced in an axial direction by substantially the same amount due to dimensional changes in the laser occurring during operation of the laser. When attached to the laser, the rigid support is spaced apart from the laser tube to allow for the adjustment of the angular positioning of the optical element. Furthermore, the aperture and optical element are disposed transverse to the optical axis and are aligned with the optical axis. Adjustment of the adjustable mounting devices changes the angular position of the optical element relative to the optical axis.

Adjustable mounting unit for an optical element of a gas laser

An electrode arrangement for a gas laser is provided. The electrode arrangement includes an elongated high voltage electrode, an elongated ground electrode disposed adjacent to the high voltage electrode, a discharge gap between the two electrodes an insulator element, a high voltage conductor having a first end connected to the high voltage electrode and extending through the insulator element, and a shadow plate interposed between the discharge gap and the insulator element. The electrode arrangement may be employed in a variety of gas lasers, including excimer lasers.

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Landshut, Germany

Hans Kodeda