Microlas Lasersystem Gmbh

Other

Hewlett-packard Company

Lambda Physik Ag

Lambda Physik Forschungsgellschaft

Microlas Lasersystm Gmbh

Hans-Jurgen Kahlert

Berthold Burghardt

Si-Ty Lam

Herbert Gross

Wilhelm Tamm

Siegfrid Dippon

Robert Grub

Ulrich Sowada

Jurgen Schweizer

Heinrich Endert

Uwe Sarbach

Joachim Schulte In Den Baumen

An optical apparatus for the homogenization of laser radiation, in particular of an excimer laser, and for the generation of several lighting fields (F1, F2) from this radiation comprises a plurality of acentric lens segments (G1a, G1b, G1c, G1d; G2a, G2b, G2c, G2d). The acentric lens segments are characterized in that they are segments of cylindrical lenses with an axis of symmetry and that the portion of the cylindrical lens which contains the axis of symmetry is not part of the acentric lens segment. Several groups (G1, G2) of acentric cylindrical lens segments are provided, with each group generating a lighting field (F1, F2) of homogeneous energy density. A collecting lens (S) is arranged downstream of the acentric lens segments, which generates the lighting fields (F1, F2) on a work plane (E).

Optical apparatus for the homogenization of laser radiation and the

An optical device is described for generating a sharp illuminating line on an illuminating plane from a high-power laser beam. The sharp illuminating line includes long and short axes. The optical device comprises an anamorphic setup of imaging and homogenizing optical systems for the separate imaging and homogenizing of the laser beam in the directions of the long and short axes. For imaging and homogenizing the laser beam in the direction of the short axes, a slit is illuminated homogeneously and the slit is imaged on the illumination plane by reducing optics.

Optics for forming a sharp illuminating line of a laser beam

An apparatus for laser machining by creating a plurality of discrete and separate beams which are sent to a deflecting device including a support and a plurality of individual elements that act independently and are individually controlled to machine different points on the workpiece simultaneously.

Apparatus for laser machining with a plurality of beams

An optical device for homogenizing a light beam comprises a plurality of first lenses on which the light beam impinges from one side. At the side on which the light beam impinges the first lenses are convex, while they are prismatic at the opposite side at which the light beam emerges from the lenses. At least one convergent lens is disposed downstream of the lenses mentioned in the direction of the light beam. Instead of giving the first lenses a prismatic configuration it is also possible to make the first lenses plano-convex and arrange second lenses of plano-concave shape downstream of the first lenses in the direction of the light beam.

Device for homogenizing a light beam

For monitoring the working of a workpiece (W) with pulsed radiation of an excimer laser the workpiece surface is periodically illuminated with visible light (B) synchronously with at least some of the laser pulses. A mirror arrangement (S) separates visible light from ultraviolet laser light so that an image corresponding to the working operation can be picked up with a video camera (VK).

Method and apparatus for monitoring the working of a workpiece with

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Gottingen, Germany

Hans-Jurgen Kahlert