Siemens Aktiengesellschaft

Hans Hellebrand

Karl Lubitz

Dieter Cramer

Christoph Hamann

Helmut Schmelz

Andreas Wolff

Clemens Scherer

Leopold Hanke

A method for manufacturing a monolithic piezoelectric actuator of multilayer design and having a high aspect ratio of more than two built up from a plurality of smaller stacks in a multilayer design, includes alternately layering green piezoceramic films and electrode material, compressing the layers while elevating the temperature to remove the binder and thereby form a composite, stacking several of the composites on one another, and sintering the stack so as to form the monolithic piezoelectric actuator which exhibits an improved mechanical strength with good piezoelectric properties.

Method for producing a monolithic multilayer piezo actuator

A piezoelectric actuator, and method of producing same, wherein electrically conductive contact tabs are applied onto metallization strips in such a way that a projecting region remains, so that in the event of cracks nevertheless occurring, such cracks run in the projecting region of the contact tab and are bridged electrically.

Piezoelectric actuator with a new type of contacting and a method for the production thereof

A monolithic piezoelectric actuator is made of a stoichiometric PZT ceramic (,) with low A-site doping, and electrode layers (,) containing silver and palladium. It exhibits an improved mechanical strength with good piezoelectric properties. The production process leads to optimum grain sizes and optimum piezoelectric properties irrespective of any B-site doping in the ceramic. Multilayer piezoelectric actuators with high application temperatures up to 150&deg; C. can be obtained.

Process for manufacturing monolithic multilayer piezoelectric actuator

A low porosity sintered polycrystalline silicon film is produced by grinding initial silicon material in a non-oxygen-containing liquid, such as decahydronaphthalene, to an average grain size corresponding to a specific surface of at least 50 m.sup.2 /g; thickening the so-attained grinding mass with a non-oxygen-containing material, such as polyisobutylene and/or polyethylene in a suitable solvent, so as to attain a viscosity in the resultant slip suitable for drawing a film from such slip, and drawing a film from such slip, optionally dividing the film into desired sized pieces, and sintering the resultant film or pieces.

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München, Germany

Hans Hellebrand