Leybold Systems Gmbh

Leybold Aktiengesellschaft

Heraeus Instr. Gmbh & Leybold Ag

Hans-Georg Lotz

Harro Hagedorn

Werner Schwarz

Gunter Thomas

Hermann Kloberdanz

G&uuml;nter Br&auml;uer

Horst Kremmling

Michael K&ouml;nig

G&ouml;tz Teschner

Alfons Z&ouml;ller

Michael Liehrr

Jochen Schneider

J&uuml;rgen Meinel

In an apparatus for the coating of substrates in a vacuum with rotatable substrate carriers (,) and with a loading and an unloading station (,or,), two vacuum chambers (,) are provided with several coating stations (,or,to,), directly next to one another, wherein a rotatable transport arm (,or,) is accommodated in each of the two chambers (,), and the transport planes of the two transport arms (,) are aligned with one another. In the separation area of the two chambers (,), an air lock is provided with a corresponding transfer apparatus (,) with two transport arms (,), whose rotary plate (,) is provided with substrate storage unit (,) and projects about halfway into one chamber (,) and halfway into the other chamber (,), wherein one chamber (,) has both the loading as well as the unloading station (,or,).

Apparatus for the coating of substrates in a vacuum chamber

A system for coating a substrate with a thin film which has a high transmissivity in the visible spectrum and a high reflectivity in the thermal radiation spectrum. The film coating has at least one carbon layer crystallized with a diamond structure and doped with foreign atoms, the carbon layer being electrically conductive depending upon the doping concentration cA of the foreign atoms and having low radiation emissivity in the thermal radiation spectrum.

Coating system transparent to light and reflecting thermal radiation

Heating apparatus for cooking food, especially a hot plate

Interference filter for deuterium lamp for spectral analyzers

Growing community of inventors

Grundau, Germany

Hans-Georg Lotz