Carl Zeiss Multisem Gmbh

Hans Fritz

Dirk Zeidler

Stefan Schubert

Joerg Jacobi

Ingo Mueller

Ralf Lenke

Arne Thoma

Georgo Metalidis

András G Major

A particle beam system includes a multi-beam particle source and a magnetic multi-deflector array. The magnetic multi-deflector array includes a coil that is arranged such that, during use of the particle beam system, a multiplicity of individual particle beams substantially passes through the first coil so that they are deflected in an azimuthal direction to correct an azimuthal telecentricity error of the particle beam system so that the individual particle beams telecentrically impinge on an object plane of the particle beam system.

Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system

A particle beam system and, such as a multi-beam particle microscope, can have a current intensity of individual particle beams that is flexibly set over large value ranges without structural modifications. The particle beam system can include a condenser lens system, a pre-multi-lens array with a specific pre-counter electrode and a pre-multi-aperture plate, and a multi-lens array. The system can includes a controller to supply adjustable excitations to the condenser lens system and the pre-counter electrode so that the charged particles are incident on the pre-multi-aperture plate in telecentric manner.

Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams

A method includes operating a multiple particle beam system at different working points. The numerical aperture can be set for each of the working points in such a way that the resolution of the multiple particle beam system is optimal. In the process, the beam pitch between adjacent individual particle beams on the sample to be scanned is kept constant as a boundary condition. There are no mechanical reconfigurations of the system whatsoever for the purposes of varying the numerical aperture.

Method for operating a multiple particle beam system while altering the numerical aperture, associated computer program product and multiple particle beam system

Growing community of inventors

Grabs, Switzerland

Hans Fritz