Imm, Institut Fur Mikrotechnik Gmbh

Hans-Dieter Bauer

Wolfgang Ehrfeld

Klaus Mullen

Herbert Oskar Moser

Christoph Bubeck

A method to produce nonlinear optical microcomponents is described which makes it possible to employ material combinations not yet used to date. By means of X-ray depth lithography not only waveguide structures, but also microcell structures are produced, into which subsequently material of nonlinear optical properties is placed. By means of X-ray depth lithography and micromolding techniques a mold insert with a waveguide structure is produced as a positive mold, and the waveguide structure is impressed into a polymer base material by means of the mold insert. Then the impressed waveguide structure is filled with optically linear material, and after the filling operation at least one microcell structure is produced, at least in the areas of the optically linear material, into which microcell structure optically nonlinear material is placed. The microcell structure may also be impressed by means of another mold insert.

Method to produce nonlinear optical microcomponents

A method to produce nonlinear optical microcomponents is described which employs hitherto not yet used material combinations. Not only waveguide structures are produced by means of X-ray depth lithography, but also microcell structures, into which materials having nonlinear optical properties are introduced. The microstructure is produced as a positive mold part, from which there is subsequently generated, by means of electroforming, a mold insert, a negative of which is made using a polymer material. After the molding operation the microstructure is applied to a substrate, and nonlinear optical material, covered by a cover plate if needed or desired, is introduced into the microcell structure.

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Partenheim, Germany

Hans-Dieter Bauer