Siltronic Ag

Wacker-chemitronic Gesellschaft Fur Elektronik-grundstoffe Mbh

Hans Adolf Gerber

Anton Huber

Alfred Pardubitzki

Georg Hochgesang

Joerg Moser

Peter Wagner

Arthur Schweighofer

Werner Zipf

Manfred Schmiedlindl

A semiconductor wafer has a front side, a rear side and an edge which runs along the circumference of the semiconductor wafer and which connects the front side and the rear side of the edge having a defined edge profile, the edge profile being substantially constant over the entire circumference of the semiconductor wafer. A method for producing such a wafer allows for production of a multiplicity of semiconductor wafers, the edge profile being substantially constant from semiconductor wafer to semiconductor wafer.

Semiconductor wafers with highly precise edge profile and method for producing them

A wafer holding device including a frame (2) which surrounds a wafer (1) ch is received without contact, which can be moved with the wafer having at least three holding elements (3) which are directed toward the outside circumference of the wafer and which can be changed from a holding position to a release position. The wafer can be supported in the holding device during many steps associated with movement in the production process so that a multiplicity of gripping and release operations which stress the wafer surface are unnecessary.

Holding device and method for treating wafer-like objects, and a method

Growing community of inventors

Burghausen, Germany

Hans Adolf Gerber