Applied Materials, Inc.

Hanish Panavalappil Kumarankutty Kumar

Anantha K Subramani

Ramcharan Sundar

Arun Kumar Kotrappa

Embodiments disclosed herein include an RF return assembly. In an embodiment, the RF return assembly comprises a first plate with a flange, where a first hole and a second hole pass through the flange. The RF return assembly may further comprise a second plate over the first plate, and a first body positioned above the flange. In an embodiment, the RF return assembly further comprises a second body positioned below the flange, where the first body is affixed to the second body by a pillar that passes through the first hole. In an embodiment, the RF return assembly further comprises a spring attached between the second plate and the second body, where the spring passes through the second hole, and a conductive band to electrically couple the first body to the flange.

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Karnataka, India

Hanish Panavalappil Kumarankutty Kumar