Shanghai Micro Electronics Equipment (group) Co., Ltd.

Shanghai Micro Electronics Equipment Co., Ltd.

Hanchuan Ji

Shuo Shi

Qingsheng Chen

A magnetic gravity compensator comprises a stator (), a rotor (), a base () and an adjustment mechanism (). The stator () is disposed on the base (), and the rotor () is levitated with respect to the stator (). The stator () comprises a central cylindrical magnet () that is fixed to the base () by the adjustment mechanism () and consists of at least two arc magnets (). The adjustment mechanism () has a first end fixed to the base () and a second end securely connected to the at least two arc magnets (). The adjustment mechanism () is configured to drive the at least two arc magnets () to synchronously move radially with respect to a central axis of the central cylindrical magnet () so as to change a magnetic circuit between the central cylindrical magnet () and the rotor (), and thereby adjust a magnetic levitation force between the stator () and the rotor ().

Adjustable magnetic buoyancy gravity compensator

A self-damping shutter apparatus for use in an exposure system of a photolithography machine, comprising: at least two pieces of shutter blades () for cutting off light source to an exposure area when the shutter is closed; a shutter driving arm (), for driving the shutter blades () to synchronically open or close; a magnetic damping brake motor (), for driving or braking the shutter driving arm (), and the magnetic damping brake motor () drives and brakes, via the shutter driving arm (), the shutter blades (). The self-damping shutter apparatus for use in the exposure system of the photolithography machine increases consistency of opening or closing the shutter blades, improves a light shading effect of the shutter apparatus in an exposure, and improves stability in the process of opening or closuring the shutter blades. When the shutter blades complete actions of opening or closing, current is not needed, the magnetic damping braking motor enables the shutter blades to maintain the state of opening or closing, shortens duration of control current, reduces heat dissipation, and saves energy.

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Shanghai, China

Hanchuan Ji