Intel Corporation

Google Inc.

Tahoe Research, Ltd.

Han Wui Then

Marko Radosavljevic

Sansaptak W Dasgupta

Robert S Chau

Paul B Fischer

Ravi Pillarisetty

Benjamin Chu-Kung

Seung Hoon Sung

Sanaz Kabehie Gardner

Niloy Mukherjee

Walid M Hafez

Gilbert W Dewey

Jack T Kavalieros

Willy Rachmady

Van H Le

Matthew V Metz

Rahul Ramaswamy

Nidhi Nidhi

Johann Christian Rode

Valluri Ramana Rao

Bruce A Block

Niti Goel

Jessica S Kachian

Kevin Lai Lin

Harald Gossner

Kimin Jun

Peter Baumgartner

Stephan Leuschner

Richard Geiger

Johanna M Swan

Adel A Elsherbini

Uday Shah

Nicole K Thomas

Domagoj Siprak

Nancy M Zelick

Uwe Hodel

Sherry R Taft

Pratik Koirala

Aleksandar Aleksov

Shawna M Liff

Feras Eid

Scott Bruce Clendenning

Peter G Tolchinsky

Mohammad Enamul Kabir

Brian S Doyle

Patrick R Morrow

Glenn A Glass

Charles C Kuo

Gerhard Schrom

Roza Kotlyar

Krishna Bharath

Gerald S Pasdast

Ibrahim Ban

Kevin P O'brien

Samuel James Bader

Nityan Labros Nair

Samuel Jack Beach

Pavel M Agababov

Seung Hoon Hoon Sung

Anand S Murthy

Abhishek A Sharma

Prashant Majhi

Zhiguo Qian

Zdravko Boos

Wilfred Gomes

Mark Armstrong

Satyarth Suri

Tristan A Tronic

John J Plombon

Michael L McSwiney

Gregory W Chance

Robert B Turkot, Jr

Beomseok Choi

Dipanjan Basu

Nebil Tanzi

Yang Cao

Georgios Panagopoulos

Nicholas James Harold McKubre

Luis Giles

Sanaz Kabehie

Sandrine Charue-Bakker

Rajat K Paul

Sansaptak Dusgupta

Heli Chetanbhai Vora

Xiaojun Weng

Mark Radosavljevic

Tushar Talukdar

Nicholas McKubre

Marko Radosavlijevic

Benjamin Chu-King

Nitika Goel

Disclosed herein are IC devices, packages, and device assemblies that include III-N diodes with n-doped wells and capping layers. An example IC device includes a support structure and a III-N layer, provided over a portion of the support structure, the III-N layer including an n-doped well of a III-N semiconductor material having n-type dopants with a dopant concentration of at least 5×10dopants per cubic centimeter. The IC device further includes a first and a second electrodes and at least one capping layer. The first electrode interfaces a first portion of the n-doped well. The capping layer interfaces a second portion of the n-doped well and includes a semiconductor material with a dopant concentration below 10dopants per cubic centimeter. The second electrode is provided so that the capping layer is between the second portion of the n-doped well and the second electrode.

III-N diodes with n-doped wells and capping layers

High voltage metal insulator metal capacitors are described. In an example, a capacitor includes a first electrode plate, and a first capacitor dielectric on the first electrode plate. A second electrode plate is on the first capacitor dielectric and is over and parallel with the first electrode plate, and a second capacitor dielectric is on the second electrode plate. A third electrode plate is on the second capacitor dielectric and is over and parallel with the second electrode plate, and a third capacitor dielectric is on the third electrode plate. A fourth electrode plate is on the third capacitor dielectric and is over and parallel with the third electrode plate. In another example, a capacitor includes a first electrode, a capacitor dielectric on the first electrode, and a second electrode on the capacitor dielectric. The capacitor dielectric includes a plurality of alternating first dielectric layers and second dielectric layers.

High voltage metal insulator metal (MIM) capacitor

Gallium nitride (GaN) integrated circuit technology is described. In an example, an integrated circuit structure includes a substrate including silicon, the substrate having a top surface. A first trench is in the substrate, the first trench having a first width. A second trench is in the substrate, the second trench having a second width less than the first width. A first island is in the first trench, the first island including gallium and nitrogen and having first corner facets below the top surface of the substrate. A second island is in the second trench, the second island including gallium and nitrogen and having second corner facets below the top surface of the substrate.

Gallium nitride (GaN) integrated circuit technology

An integrated circuit structure includes a substrate including silicon, the substrate having a top surface. A first trench is in the substrate, the first trench having a first width and a first height. A second trench is in the substrate, the second trench having a second width and a second height. The second width is greater than the first width, and the second height is greater than the first height. A first island is in the first trench, the first island including gallium and nitrogen and having first corner facets at least partially below the top surface of the substrate. A second island is in the second trench, the second island including gallium and nitrogen and having second corner facets at least partially below the top surface of the substrate.

Gallium nitride (GaN) selective epitaxial windows for integrated circuit technology

Gallium nitride (GaN) integrated circuit technology with optical communication is described. In an example, an integrated circuit structure includes a layer or substrate having a first region and a second region, the layer or substrate including gallium and nitrogen. A GaN-based device is in or on the first region of the layer or substrate. A CMOS-based device is over the second region of the layer or substrate. An interconnect structure is over the GaN-based device and over the CMOS-based device, the interconnect structure including conductive interconnects and vias in a dielectric layer. A photonics waveguide is over the interconnect structure, the photonics waveguide including silicon, and the photonics waveguide bonded to the dielectric layer of the interconnect structure.

Gallium nitride (GaN) integrated circuit technology with optical communication

Disclosed herein are microelectronic assemblies including direct bonding, as well as related structures and techniques. For example, in some embodiments, a microelectronic assembly may include a first microelectronic component and a second microelectronic component coupled to the first microelectronic component by a direct bonding region, wherein the direct bonding region includes a first subregion and a second subregion, and the first subregion has a greater metal density than the second subregion. In some embodiments, a microelectronic assembly may include a first microelectronic component and a second microelectronic component coupled to the first microelectronic component by a direct bonding region, wherein the direct bonding region includes a first metal contact and a second metal contact, the first metal contact has a larger area than the second metal contact, and the first metal contact is electrically coupled to a power/ground plane of the first microelectronic component.

Direct bonding in microelectronic assemblies

Disclosed herein are inductor/core assemblies for integrated circuits (ICs), as well as related structures, methods, and devices. In some embodiments, an IC structure may include an inductor and a magnetic core in an interior of the inductor. The magnetic core may be movable perpendicular to a plane of the inductor.

Inductor/core assemblies for integrated circuits

Gallium nitride (GaN) three-dimensional integrated circuit technology is described. In an example, an integrated circuit structure includes a layer including gallium and nitrogen, a plurality of gate structures over the layer including gallium and nitrogen, a source region on a first side of the plurality of gate structures, a drain region on a second side of the plurality of gate structures, the second side opposite the first side, and a drain field plate above the drain region wherein the drain field plate is coupled to the source region. In another example, a semiconductor package includes a package substrate. A first integrated circuit (IC) die is coupled to the package substrate. The first IC die includes a GaN device layer and a Si-based CMOS layer.

Gallium nitride (GAN) three-dimensional integrated circuit technology

Disclosed herein are IC structures, packages, and devices that include Si-based semiconductor material stack monolithically integrated on the same support structure as non-Si transistors or other non-Si-based devices. In some aspects, the Si-based semiconductor material stack may be provided by semiconductor regrowth over an insulator material. Providing a Si-based semiconductor material stack monolithically integrated on the same support structure as non-Si based devices may provide a viable approach to integrating Si-based transistors with non-Si technologies because the Si-based semiconductor material stack may serve as a foundation for forming Si-based transistors.

Integration of Si-based transistors with non-Si technologies by semiconductor regrowth over an insulator material

Embodiments of the invention include a microelectronic device that includes a substrate, at least one dielectric layer on the substrate and a plurality of conductive lines within the at least one dielectric layer. The microelectronic device also includes an air gap structure that is located below two or more of the plurality of conductive lines.

Microelectronic devices having air gap structures integrated with interconnect for reduced parasitic capacitances

A device including a III-N material is described. In an example, the device has terminal structure having a first group III-Nitride (III-N) material. The terminal structure has a central body and a first plurality of fins, and a second plurality of fins, opposite the first plurality of fins. A polarization charge inducing layer is above a first portion of the central body. A gate electrode is above the polarization charge inducing layer. The device further includes a source structure and a drain structure, each including impurity dopants, on opposite sides of the gate electrode and on the plurality of fins, and a source contact on the source structure and a drain contact on the drain structure.

Group III-nitride (III-N) devices with reduced contact resistance and their methods of fabrication

Disclosed herein are microelectronic assemblies including microelectronic components that are coupled together by direct bonding, as well as related structures and techniques. For example, in some embodiments, a microelectronic assembly may include a first microelectronic component and a second microelectronic component coupled to the first microelectronic component by a direct bonding region, wherein the direct bonding region includes at least part of an inductor.

Microelectronic assemblies with inductors in direct bonding regions

A transistor includes a polarization layer above a channel layer including a first III-Nitride (III-N) material, a gate electrode above the polarization layer, a source structure and a drain structure on opposite sides of the gate electrode, where the source structure and a drain structure each include a second III-N material. The transistor further includes a silicide on at least a portion of the source structure or the drain structure. A contact is coupled through the silicide to the source or drain structure.

Silicide for group III-nitride devices and methods of fabrication

A variable capacitance III-N device having multiple two-dimensional electron gas (2DEG) layers are described. In some embodiments, the device comprises a first source and a first drain; a first polarization layer adjacent to the first source and the first drain; a first channel layer coupled to the first source and the first drain and adjacent to the first polarization layer, the first channel layer comprising a first 2DEG region; a second source and a second drain; a second polarization layer adjacent to the second source and the second drain; and a second channel layer coupled to the second source and the second drain and adjacent to the second polarization layer, the second channel layer comprising a second 2DEG region, wherein the second channel layer is over the first polarization layer.

Variable capacitance device with multiple two-dimensional electron gas (2DEG) layers

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Portland, OR, United States of America

Han Wui Then