Powertech Technology Inc.

Han-Wen Lin

Hung-Hsin Hsu

Nan-Chun Lin

Shang-Yu Chang Chien

Shang-Yu Chang-Chien

An integrated antenna package structure including a chip, a circuit layer, an encapsulant, a coupling end, an insulating layer, a conductive connector, a dielectric substrate, and an antenna is provided. The circuit layer is electrically connected to the chip. The encapsulant is disposed on the circuit layer and covers the chip. The coupling end is disposed on the encapsulant. The insulating layer covers the coupling end. The insulating layer is not externally exposed. The conductive connector penetrates the encapsulant. The coupling end is electrically connected to the circuit layer by the conductive connection. The dielectric substrate is disposed on the encapsulant and covers the coupling end. The antenna is disposed on the dielectric substrate. A manufacturing method of an integrated antenna package structure is also provided.

Integrated antenna package structure and manufacturing method thereof

A manufacturing method of a package structure is described. The method includes at least the following steps. A carrier is provided. A semiconductor die and a sacrificial structure are disposed on the carrier. The semiconductor die is electrically connected to the bonding pads on the sacrificial structure through a plurality of conductive wires. As encapsulant is formed on the carrier to encapsulate the semiconductor die, the sacrificial structure and the conductive wires. The carrier is debonded, and at least a portion of the sacrificial structure is removed through a thinning process. A redistribution layer is formed on the semiconductor die and the encapsulant. The redistribution layer is electrically connected to the semiconductor die through the conductive wires.

Manufacturing method of package structure

A package structure includes a first redistribution layer, a second redistribution layer, a die, a plurality of conductive pillars and a die-stacked structure. The first redistribution layer has a first surface and a second surface opposite to the first surface. The second redistribution layer is disposed above the first surface. The die is disposed between the first redistribution layer and the second redistribution layer and has an active surface and a rear surface opposite to the active surface. The active surface is adhered to the first surface, and the die is electrically connected to the first redistribution layer. The conductive pillars are disposed and electrically connected between the first redistribution layer and the second redistribution layer. The die-stacked structure is bonded on the second redistribution layer.

Package structure and manufacturing method thereof

A conductive layer is formed on a first surface of a first carrier. The redistribution layer is formed on the conductive layer. Then an open-test is performed to the redistribution layer. Since the conductive layer and the redistribution layer constitute a closed loop, a load should be presented during the open-test if the redistribution layer is formed correctly. After the open-test is performed, the first carrier and the conductive layer are removed. Then a short-test is performed to the redistribution layer. No load is presented during the short-test if the redistribution layer is formed correctly since the redistribution layer constitutes an open loop. Therefore, whether the redistribution layer has flaws can be determined before the dies are boned on the redistribution layer. Thus, no waste of the good die occurs because of the flawed redistribution layer.

Test method for a redistribution layer

A conductive layer is formed on the first zone of a carrier. The redistribution layer is formed on the conductive layer on the first zone and the second zone of the carrier. Then an open-test and a short-test are performed to the redistribution layer. Since the conductive layer and the parts of the redistribution layer formed on the conductive layer constitute a closed loop, a load is presented if the redistribution layer is formed correctly. In addition, no load is presented if the redistribution layer is formed correctly since the parts of the redistribution layer formed on the second zone of the carrier constitute an open loop. Therefore, whether the redistribution layer is flawed or not is determined before the dies are boned on the redistribution layer. Thus, no waste of the good die is occurred because of the flawed redistribution layer.

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Hsinchu County, Taiwan

Han-Wen Lin