Sungkyunkwan University

Samsung Electronics Co., Ltd.

Ing Co., Ltd.

Han-Seo Ko

Yong-Jae Kim

Do-Young Byun

Suk-Han Lee

Sang-Uk Son

Seung-Ho Lee

Sun Haeng Cho

Sung-Han Lee

Ji-Hye Yang

Byeong-Hoon Kim

Seung-Hwan Kang

Jae-Yong Choi

Ki-Chul An

Byung-Hwan Kong

Sang-Joon Han

Jung-Taek Oh

A heating apparatus including a side wall heat insulator configured to provide an inner space for receiving a reaction tube, an upper wall heat insulator covering a top portion of the side wall heat insulator, a heat generation part in an inner surface of the side wall heat insulator, and a heat compensating part on a lower surface of the upper wall heat insulator, the heat compensating part including a reflection surface in a first region on the lower surface of the upper wall heat insulator, the first region having a first emissivity less than an emissivity of the upper wall heat insulator may be provided.

Heating apparatus and substrate processing apparatus having the same

Disclosed is a multi-nozzle inkjet print head using an electrostatic field induced type. The inkjet print head in accordance with an embodiment of the present invention includes: a first electrode being formed in each nozzle; and a second electrode located on a side spaced from the nozzle and arranged to block between any two adjacent nozzles and inducing an electrostatic field for discharging ink from the nozzle by forming an electric potential difference between the first electrode and the second electrode.

Ink-jet print head

Disclosed are a droplet ejection device and method using an electrostatic field. The droplet ejection method includes: setting a separate electric field direction in each of a plurality of nozzles; supplying one of ink and ink containing particles to each nozzle; and forming and ejecting a plurality of separate ink droplets. The droplet ejection device includes a deposition part having electrode layers and insulating layers deposited toward a nozzle. Therefore, it is possible to readily perform droplet ejection without a heater or diaphragm vibration device. In addition, it is possible to reduce impact applied to the ink and obtain good print quality, since the ink is ejected using the electrostatic field.

Droplet ejection device and method using electrostatic field

Growing community of inventors

Seoul, South Korea

Han-Seo Ko