Samsung Electronics Co., Ltd.

Samsung Electro-mechanics Co., Ltd.

Han-ki Cho

Sang-on Choi

Chul-woo Lee

Ci-moo Song

A differential spiral magnetic field sensing device is constructed such that two soft magnetic film cores are arranged parallel to each other, each soft magnetic film core is divided into several parts in a detection axial direction to reduce anti-magnetic field components, the differential excitation coil, the magnetic flux variation detecting coil and the zero magnetic field detecting coil are laminated and wound turn by turn around the soft magnetic film cores, and there is no induced voltage waveform to the magnetic flux variation detecting coil without external magnetic field. Also, in order to minimize the leaked magnetic field components of the soft magnetic film cores, the soft magnetic film cores are sandwiched to form closed magnetic paths, and the differential excitation coil, the magnetic flux variation detecting coil and the zero magnetic field detecting coil are spirally laminated around the sandwiched soft magnetic film cores. Further, in the magnetic field detection module, a differential spiral magnetic field sensing device and a signal process for driving the same are integrated on the substrate of a monolithic semiconductor device.

Differential spiral magnetic field sensing device and magnetic field detection module using the same

A differential solenoidal magnetic field sensing device is a magnetic field sensor fabricated on a microscopic scale and is constructed by two soft magnetic film cores laminated on a semiconductor substrate, an excitation of the soft magnetic film cores, and a magnetic flux variation detecting coil formed of a spirally wound metal film pattern. Since two soft magnetic film cores constitutes closed magnetic paths, leakage of magnetic flux can be minimized. Also, the magnetic sensing device is a differential type sensor, the combination of driving signals can be offset. That is to say, the magnetic field sensing device is constructed such that two soft magnetic film cores are laminated and are formed lengthwise in the direction of a detection axis to reduce anti-magnetic field components, and the excitation coil wound around the two soft magnetic film cores and the magnetic flux variation detecting coil for obtaining the sum of magnetic flux variations generated in the soft magnetic film cores are alternately wound turn by turn around the soft magnetic film cores.

Differential solenoidal magnetic field sensing device and method for manufacturing the same

In a mirror driving method of a micro-mirror array and an apparatus thereof, each of a plurality of mirrors is pivotally supported by hinges fixed to a substrate, and a permanent magnet is attached beneath the substrate to form a magnetic field about the mirrors. A coiled conductive layer is formed on the rear surface of each mirror to be selectively applied with current according to a video signal, and the selected mirror pivots in correspondence with the electrostatic force operative between the conductive layer to which the current is applied and the magnetic field. Thus, a light beam irradiating the micro-mirror array can be modulated according to an image, and mass production is made possible due to a simple structure which provides for a stable driving action.

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Suwon, South Korea

Han-ki Cho