Integrated Dynamics Engineering Gmbh

Han Hartgers

Arndt Evers

Simon Schadt

Frank Hofmann

Till Scharf

Carsten Conrady

Björn Dollak

Bernd Riemann

A stationary vibration isolation system including a plurality of isolators by way of which a load which is mounted in a vibration isolated manner is supported. The vibration isolation system includes a plurality of actuators by way of which vibrations of the load are actively countered. Each isolator respectively has its own separate control unit with a digital-analog converter for controlling the actuators.

Stationary vibration isolation system and control method thereof

An active vibration isolation system with a magnetic actuator where the magnetic actuator includes a coil carrier with at least one coil which engages in a magnetic actuator without touching it so that it takes the form of a linear motor. The magnetic actuator has a magnetic shield with an opening through which the coil carrier extends into the magnet carrier.

Vibration isolation system with one or more magnetic actuators

A pneumatic actuator configured for a stationary vibration isolation system which serves to accommodate equipment for processing semiconductor devices. The pneumatic actuator comprises a working space with a piston which divides the working space into a first and a second pressure chamber, and the piston is spaced apart from an inner surface of the working space by a gap, and the piston is movable only in an axial direction.

Pneumatic actuator and method for operating an active vibration isolation system

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Mainz, Germany

Han Hartgers