Samsung Display Co., Ltd.

Han Geul Lim

Jae Hoon Lee

Byung Jin Choi

Hyuk Kang

A mask cleaning apparatus includes a cleaning bath including an accommodating space in which a cleaning solution is stored, a transfer robot transferring a mask, and an induction heating member disposed inside the accommodating space. The cleaning bath includes at least one side and a bottom surface, which define the accommodating space. The induction heating member includes a first heating member, a second heating member, and a waterproof layer covering the first heating member and the second heating member.

Growing community of inventors

Yongin-si, South Korea

Han Geul Lim