Taiwan Semiconductor Manufacturing Comp. Ltd.

Han-Chih Chung

Chia-Chi Chung

Ying-Hao Wang

Yu-Shine Lin

Yu-Xiang Lin

Yu-Hen Wu

Han Wen Hsu

Hsun-Peng Lin

Hsin-Kuo Chang

Chi-Jen Hsieh

Yueh-Chih Wang

Various embodiments of the present application are directed towards an edge-exposure tool with a light emitting diode (LED), as well as a method for edge exposure using a LED. In some embodiments, the edge-exposure tool comprises a process chamber, a workpiece table, a LED, and a controller. The workpiece table is in the process chamber and is configured to support a workpiece covered by a photosensitive layer. The LED is in the process chamber and is configured to emit radiation towards the workpiece. A controller is configured to control the LED to expose an edge portion of the photosensitive layer, but not a center portion of the photosensitive layer, to the radiation emitted by the LED. The edge portion of the photosensitive layer extends along an edge of the workpiece in a closed path to enclose the center portion of the photosensitive layer.

Edge-exposure tool with an ultraviolet (UV) light emitting diode (LED)

The present disclosure provides a method of cleaning a semiconductor wafer during a process of fabricating a semiconductor device. The method includes loading a semiconductor wafer into a wafer handling system. The method includes removing contaminant particles from an edge region of the wafer from the back side, wherein alignment marks are located in the edge region. The method includes collecting the removed contaminant particles and discarding the collected contaminant particles out of the wafer handling system. The disclosure also provides an apparatus for fabricating a semiconductor device. The apparatus includes a wafer cleaning device that is operable to clean a predetermined region of the wafer on the back surface thereof. The predetermined region of the wafer at least partially overlaps with one or more alignment marks.

Removal of particles on back side of wafer

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Pingzhen, Taiwan

Han-Chih Chung