Park Systems Corporation

Han Aul Noh

Ah Jin Jo

Ju Suk Lee

Sang Han Chung

Suk Hyun Kim

An image acquiring method for acquiring an image using a measurement apparatus including an image acquiring means which acquires an image of a surface of a target to be measured in the unit of predetermined size pixels and a moving means capable of moving the target to be measured, the image acquiring method includes: acquiring an image of a first region from the surface of the target to be measured through the image acquiring means; acquiring an image of a second region, which is different from the first region, by moving the target to be measured, through the moving means; acquiring a differential image by subtracting, from either the image of the first region or the image of the second region, the other image; and overlapping the differential image multiple times.

Image acquiring method and image acquiring apparatus using the same

The present invention relates to a leveling apparatus that levels an object to be leveled with a surface of a substrate by measuring the force applied to the object, and an atomic force microscope including the leveling apparatus. A leveling apparatus according to the present invention, which levels an object with a substrate such that one side of the object is brought in parallel contact with the surface of the substrate, includes: force sensors disposed to measure force at at least three points on the other side of the object; an angle adjusting unit disposed to adjust the angle between the object and the surface of the substrate; and a controller connecting with the force sensors and the angle adjusting unit to drive the angle adjusting unit on the basis of data from the force sensors. The controller obtains the data on force applied to the force sensors by bringing one side of the object in contact with the surface of the substrate at a predetermined angle, calculates the degree of relative inclination between the object and the surface of the substrate from the data on force, and levels the object with the surface of the substrate by adjusting the angle of the object or the substrate with the angle adjusting unit on the basis of the degree of relative inclination.

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Suwon-si, South Korea

Han Aul Noh