Asml Netherlands B.v.

Halil Gökay Yeǧen

Sebastianus Adrianus Goorden

Jim Vincent Overkamp

Ties Wouter Van Der Woord

Alexander Ludwig Klein

Edgar Alberto Osorio Oliveros

Luc Roger Simonne Haspeslagh

Guilherme Brondani Torri

Nitesh Pandey

A micromirror array comprises a substrate, a plurality of mirrors for reflecting incident light and, for each mirror of the plurality of mirrors, at least one multilayer piezoelectric actuator for displacing the mirror, wherein the at least one multilayer piezoelectric actuator is connected to the substrate, and wherein the at least one multilayer piezoelectric actuator comprises a plurality of piezoelectric layers of piezoelectric material interleaved with a plurality of electrode layers to form a stack of layers. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection and/or metrology apparatus.

High force low voltage piezoelectric micromirror actuator

Growing community of inventors

Eindhoven, Netherlands

Halil Gökay Yeǧen