Samsung Electronics Co., Ltd.

Hakgyun Kim

Bumsuk Chung

A method of estimating a breakdown voltage of a silicon dioxide film includes; generating breakdown voltage information associated with first test dies selected from among test dies, generating a breakdown voltage estimation model by updating a parameter of a neural network model based on the breakdown voltage information, applying test voltages to second test die selected from among the test dies and distinct from the first dies and receiving currents levels for current generated by the second test dies in response to the test voltages, wherein the test voltages have respective levels lower than levels of breakdown voltages for the first test dies, and estimating breakdown voltages of the second test dies using the breakdown voltage estimation model in relation to the currents levels.

Apparatus and method estimating breakdown voltage of silicon dioxide film using neural network model

An operating method for a distribution output device includes; generating data number sets for data groups, grouping defect times according to an order in which the corresponding defects occurred in relation to each of the data number sets, calculating likelihood summations respectively corresponding to the data number sets in relation to defect times grouped in accordance with the data number sets, determining a maximum likelihood summation among the likelihood summations, determining optimal population parameter data for each of the data groups in relation to the maximum likelihood summation, and outputting a Weibull distribution for each of the data groups in relation to the optimal population parameter data for each of the data groups.

Distribution output device and operating method

A method of analyzing defects in a semiconductor device includes: collecting current data by applying a test voltage to the semiconductor device; extracting data within a decrease range from the current data; dividing the current data into a first component value and a second component value using the current data and the data extracted from within the decrease range; calculating a first quality index from the first component value satisfying a first function; and calculating a second quality index from the second component value satisfying a second function that is different from the first function.

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Suwon-si, South Korea

Hakgyun Kim