Nanospace Ab

Hakan Johansson

Johan Bejhed

Pelle Rangsten

Tor-Arne Gronland

Pelle Ransten

A wafer assembly () includes a substrate (), in turn including a wafer () or a stack of wafers. The wafer assembly () further includes an electrical connection () arranged through at least a part of the substrate (). The electrical connection () is made by low-resistance silicon. The electrical connection () is positioned in a hole () penetrating at least a part of the substrate (). A surface () of the substrate () confining the hole () is electrically insulating. The electrical connection () has at least one protrusion (), which protrudes transversally to a main extension () of the hole () and the protrusion () protrudes outside a minimum hole diameter (), as projected in the main extension () of the hole (). Preferably, the protrusion () is supported by a support surface () of the substrate (). A manufacturing method is also disclosed.

Substrate-penetrating electrical connections

A nozzle arrangement for use in a gas thruster is presented. At least one heater micro structure () is arranged in a stagnation chamber () of the gas thruster. The heater microstructure () comprises a core of silicon or a silicon compound coated by a surface metal or metal compound coating. The heater microstructure () is manufactured in silicon or a silicon compound and covered by a surface metal coating. The heater microstructure () is mounted in the stagnation chamber () before or after the coverage of the surface metal or metal compound coating. The coverage is performed by heating the heater microstructure and flowing a gas comprising low quantities of a metal compound. The compound decomposes at the heated heater microstructure (), forming the surface metal or metal compound coating. The same principles of coating can be used for repairing the heater microstructure () in situ. The driving gas comprises preferably a compound exhibiting an exothermic reaction when coming into contact with a catalytically active material. If the gas is exposed to heater microstructures being covered with the catalytically active material, the gas is further heated by the catalytic reaction.

Growing community of inventors

Uppsala, Sweden

Hakan Johansson