Tomoegawa Co., Ltd.

National Institute of Advanced Industrial Science and Technology

Tomoegawa Paper Co., Inc.

Tomoegawa Corporation

Emd Corporation

Hajime Tsuda

Fujio Mizukami

Takeo Ebina

Katsumi Motegi

Tomohito Inoue

Katsuya Okumura

Akinori Ebe

Takanori Suzuki

Hideki Moriuchi

Daisuke Muramatsu

Minoru Tsuchida

A radio-frequency antenna through which a high amount of current can be efficiently passed even at a radio-frequency level for plasma generation, as well as a plasma processing device utilizing the radio-frequency antenna. A radio-frequency antenna includes a metal fiber sheet. A plasma processing device includes: a vacuum container including a wall having an opening; a radio-frequency antenna including a metal fiber sheet and located at the opening; and a dielectric protection plate located closer to the interior of the vacuum container than the radio-frequency antenna and configured to close the opening in a gas-tight manner. The radio-frequency antenna including a metal fiber sheet has a larger surface area and a lower impedance to a radio-frequency current than a radio-frequency antenna including a metal plate having the same outer shape. Therefore, it allows a radio-frequency current commonly used for plasma generation to be more efficiently passed through in large amounts.

Radio-frequency antenna and plasma processing device

The present invention provides a cushion member and a stage member provided with the cushion member, the cushion member including a non-woven fabric formed by binding or entangling metal fibers, wherein when the cushion member is compressed, the cushion member undergoes compressive deformation and the following compressive deformation ratio is 5% to 80%:Compressive deformation ratio=(0&#x2212;1)/0&#xd7;100,

Cushion paper

A method for producing a clay thin film, which is formed of clay alone or in combination with an additive and has a structure where oriented clay particles are laminated, the method including paste-making in which clay alone or in combination with an additive are dispersed in a dispersion medium formed of water, an organic solvent, or a mixed solvent of water and an organic solvent to prepare clay paste; coating in which a thin film is formed by coating the clay paste on a substrate; planarization in which the thin film is planarized; drying in which water, an organic solvent, or water and an organic solvent are removed from the thin film; and separation in which the thin film is separated from the substrate.

Method for producing clay thin film

A clay thin film substrate including a clay thin film having a structure, in which oriented clay particles are laminated; and at least a gas barrier inorganic layer which is laminated on at least one surface of the clay thin film.

Clay thin film substrate, clay thin film substrate with electrode, and display device using the same

The invention provides fluororesin fiber paper excellent in adhesion to a copper foil, heat resistance, chemical resistance, low water absorption and electric insulation and capable of being used as a substrate of a printed board suitable for use in high frequency, of which a low dielectric loss is required. The fluororesin fiber paper is a porous sheet obtained by forming a slurry comprising fluororesin fiber into a sheet by a wet paper making method and sintering the resultant sheet and has an average pore diameter of 0.5 to 50 &#x3bc;m and a maximum pore diameter of at most 250 &#x3bc;m. A copper-clad laminate for printed board is produced by laminating the fluororesin fiber paper and a copper foil having a ten point mean height of surface roughness profile (Rz) of 0.5 to 8.0 &#x3bc;m on each other by means of vacuum hot pressing.

Fluororesin fiber paper, copper-clad laminate for printed board using the same and production process thereof

Growing community of inventors

Shizuoka, Japan

Hajime Tsuda