Mitsubishi Denki Kabushiki Kaisha

Mitsubishi Electric Corporation

Toshiba Mitsubishi-electric Industrial Systems Corporation

Mitsubishi Denki K.k.

Hajime Nakatani

Atsushi Sugitatsu

Hitoshi Wakata

Yoshiaki Odai

Daisuke Takauchi

Masaki Kuzumoto

Noboru Wada

Haruhiko Nagai

Kenyu Haruta

Yasushi Minamitani

Norimitsu Esaki

Taichiro Tamida

Yoshibumi Minowa

Tadao Minagawa

Takashi Kumagai

Kenichi Yasuda

Yasutaka Inanaga

Yasuhiro Tanimura

Youichiro Tabata

Hideo Ichimura

Toshinori Yagi

Toshihiro Yoshida

Tomoaki Takeda

Yoshifumi Matsushita

Shingo Mine

Akihiko Iwata

Yukio Sato

Koji Ohta

Yujiro Okihara

Shigeki Maekawa

Kenji Shimohata

Koji Yamazaki

Masaharu Moriyasu

Nobuyuki Zumoto

Tetsuya Tamura

Toshiaki Yoshizumi

Akaru Usui

Takahisa Nagayama

Tetsuya Saitsu

Satoru Ishizaka

Yoshihiko Yamamoto

Masao Izumo

Akio Masuda

Kazutoshi Kurahashi

Koichi Tokimori

Taketoshi Takemura

Keiko Ito

Masayuki Endo

Taichiro Tamita

Hiromi Kaneko

Hiroyuki Mukumoto

Takashi Eura

Shungo Tsuboi

Kazuyuki Murakami

Hiroyuki Igehara

Hideki Kita

Naoki Hiranabe

Kouji Ota

An air core type reactor unit, includes a first insulating plate which is provided with a first insulating spacer on one side, a first ferromagnetic member metal plate fixed to an insulating plate, two or more air core coils each having an air core part and formed of coil layers with the separation of an air gap, a second insulating plate, which is provided with a second insulating spacer on another side thereof and has a width smaller than an inside diameter of the coil, to incorporate more air into, a second ferromagnetic member metal plate fixed to an insulating plate, and an insulating stick passing through the air core part of the air core coils, wherein the air core coils are arranged in parallel, and held and fixed between the first insulating plate and the second insulating plate through the first insulating spacer and the second insulating spacer.

Air core type reactor unit and electric power supply equipment having an air core type reactor unit

This invention aims at improving the reliability of the electrode in an ozone generator, and also at shortening the start-up time of the ozone generator after the maintenance. The ozone generator comprising; a dielectric discharge tube, having a closed end and an open end which are faced each other, and including an electrode formed on an inner surface thereof, a sealing lid, covering the open end of the dielectric discharge tube and fixed to the dielectric discharge tube with an adhesive, a power supply brush, in inscribed contact with the electrode formed on the inner surface of the dielectric discharge tube, and a grounding electrode, arranged concentrically with the dielectric discharge tube; wherein the sealing lid includes a main body part and a cylinder part, which are connected together, and an inside diameter of the cylinder part is larger than an outside diameter of the dielectric discharge tube.

Ozone generator

A system including: an ozone generating device including discharge electrodes forming a discharge space; a gas supplying device; a power source device that supplies power to the discharge electrodes; a temperature adjustment device that adjusts temperature of the discharge electrodes; a control unit that controls the ozone generating device; and a detection unit that detects an ozone generation parameter in the ozone generating device. The control unit increases temperature of the discharge electrodes up to a vaporizing temperature of dinitrogen pentoxide by controlling the temperature adjustment device and the gas supplying device or the temperature adjustment device and the power source device, based on the output ozone generation parameter, to thereby switch operation from a normal operation mode to a cleaning operation mode in which surfaces of the discharge electrodes and the discharge space are cleaned up while continuing generation of ozone in the discharge space.

Ozone-generating system and ozone generation method

An ozone generating apparatus which is provided with a discharge suppressing member formed of a metal plate and covering an outer circumferential surface of a portion of a dielectric tube facing to a tube sheet, the discharge suppressing member being electrically in contact with a metal tube or the tube sheet, wherein the discharge suppressing member is formed by curling the metal plate longer than a circumferential length of the dielectric tube into a circular shape so as to have an overlapping portion, and by joining together, in the overlapping portion, a part of the metal plate placed outside and a part of the metal plate placed inside, at a near-end portion of the metal plate placed outside in the overlapping portion, and wherein the discharge suppressing member has, on the part of the metal plate placed outside in the overlapping portion, a spring portion.

An ozone generation system comprises an electricity charge unit price storing part which stores an electricity charge unit and a gas charge unit price storing part which stores a gas charge unit price, based on the electricity charge unit price, the gas charge unit price and necessary generation amount of ozone which is required for an ozonized gas, regarding an ozone concentration and a gas flow rate which are ozone generation amount basic parameters, values at which a running cost is a minimum are determined, a gas flow rate controller is controlled so as for a gas flow rate to be the determined gas flow rate and power of a power supply for an ozone generator is controlled so as for an ozone concentration to be the determined ozone concentration.

Ozone generation system and method for operating ozone generation system

In a device having capacitive loads in which a plurality of capacitive loads are connected in parallel, power is supplied from an AC power source to a load group comprising the plurality of capacitive loads, the load group is divided into a plurality of small load groups, and a current detecting sensor for detecting a current which flows in at least one small load group at a side which is closer to the load side than a branch point at which the load group is divided into the plurality of small load groups and a current abnormality detecting part for determining an abnormality of a load by a current detecting signal which is detected by the current detecting sensor are equipped.

Device having capacitive loads and abnormality detecting method thereof

An ozone generating apparatus for making a temperature distribution in a dielectric tube more uniform including a sealed vessel, two tube sheets made of a conductive metal plate having a hole formed therein which are provided at a predetermined interval to divide the inside of the sealed vessel into three spaces; a metal tube formed so as to connect holes of the tow tube sheets, a dielectric tube which is inserted into the inner part of a dielectric tube so as to have a predetermined gap between an outer wall an inner wall of a metal tube and a metal electrode formed inside the dielectric tube. An alternating current voltage is applied between the tube and electrode, a gas including oxygen flowing in a gap is discharged to generate ozone, and a discharge suppressing member is provided at a part of the gap facing a tube sheet.

Ozone generating apparatus

A method of generating ozone by applying a silent discharge to oxygen as a first raw material gas, and an oxide compound gas, as a second raw material gas, in which excited light, excited and generated by a discharge in the oxygen and the oxide compound gas, dissociates the oxide compound gas, or excites the oxide compound gas, accelerating dissociation of the oxygen and generation of ozone. In this way, ozone generation efficiency is raised.

Method of generating ozone

An ozone generating apparatus having high reliability in which a glass tube can prevent from being damaged by melting a power feeding brush even if a large amount of short-circuit current flows. In an ozone generating apparatus using silent discharge, an alternating high voltage power is supplied from a power supply to a metal film formed in an inner wall of a glass tube by a power feeding brush comprising a brush shaft made of metal and a large number of metal thin wires fixed to the periphery of the brush shaft, the following equation satisfies.(2/1)&#x2267;1/{1+(1/20&#x3b2;)},

A silent discharge plasma apparatus includes a dielectric member, a pair of electrodes opposed to each other across the dielectric member and an alternating-current source applying an alternating-current voltage between the electrodes and causing a discharge. A gas is supplied to a discharge space, where discharge occurs, and a plasma is produced. At least one of the electrodes includes a conductive power feeding thin film on the dielectric member. When the dielectric member is destroyed and an arc discharge develops between the electrodes, the power feeding thin film is eliminated or oxidized, and the arc discharge is stopped.

Silent discharge plasma apparatus

It is intended to provide a volatile organic compound treatment apparatus having: an absorption treatment chamber in which absorption frames having absorbents for absorbing volatile organic compounds are aligned in a direction of a gas flow; an absorbent recovery treatment chamber that is provided with a discharge unit having a high voltage electrode, a ground electrode, and a dielectric; and a transfer mechanism for transferring the absorption frames present in an upstream of the gas flow to the absorbent recovery treatment chamber and transferring the absorption frames in the absorbent recovery treatment chamber to a downstream of the gas flow. The volatile organic compound treatment apparatus is capable of decomposing VOC without generating a large amount of harmful NOx and reduced in apparatus cost.

Apparatus for volatile organic compound treatment and method of volatile organic compound treatment

A volatile organic compound treatment apparatus including an adsorber coming into contact with a gas to be treated and adsorbing volatile organic compounds; a plurality of pairs of electrodes, divided into a plurality of groups, which generate electric discharge so that a part of the adsorber is exposed to the electric discharge; and an electric discharge control mechanism for controlling whether or not the electric discharge is generated in what pair of the electrodes by applying a voltage to every group of the pair of electrodes such that different parts of the adsorber are sequentially exposed to the electric discharge.

Volatile organic compound treatment apparatus

A plasma-generation power-supply device includes a transformer connected to an alternating-current power-supply, a rectifier connected to the transformer, an inverter connected to the rectifier, a reactor inserted in series in a power line of an ozonizer that is supplied with power from the inverter, and a controller that controls the inverter. The controller detects the current flowing to the ozonizer with a current detector and provides a control that keeps power applied to the ozonizer constant.

Plasma-generation power-supply device

An ozone generator in which a discharge region may be enlarged without damaging ozone generating performance. In the ozonizer, an alternating current is applied between a first electrode and a second electrode, and a discharge is produced in a gap into which oxygen is injected. In the first electrode, an ozone gas passage for retrieving ozone gas generated in the discharge region is located between an electrode surface facing the discharge region and a side. The ozone gas passages are dispersed in the first electrode. The ozone gas passages collect ozone generated at discharge region locations inside the first electrode.

Ozonizer

An optical processing apparatus for processing optically a workpiece (7) by using a light beam (B). The apparatus is capable of automatically adjusting a imaging magnification to a predetermined value and at the same time maintaining constant a imaging magnification regardless of exchange of masks (3; 100) and workpieces (7) and for ensuring an extended use life of a mask with satisfactory mask function. The apparatus includes a light source system (1) for generating a light beam (B) for illuminating a mask (3; 100) having a predetermined pattern, a imaging lens (5) for copying a pattern image of the mask (3; 100) onto a workpiece (7), a mask moving mechanism (4) for moving the mask in a direction perpendicular to an optical axis (L) of the imaging lens (5), a workpiece moving mechanism for moving the workpiece in a direction perpendicular to the optical axis (L) of the imaging lens (5), a imaging magnification changing mechanism for changing inter-mask/lens/workpiece distance between the mask, the imaging lens and the workpiece, and a central control unit (9) which is comprised of an actual imaging magnification arithmetic module (91) for determining an actual imaging magnification value (M') in terms of a ratio between the copied pattern image and a predetermined pattern, a magnification decision module (92) for making decision whether or not a difference between the actual imaging magnification value and a desired imaging magnification value is smaller than a permissible value, an optical-axis displacement control module (93) responsive to indication that the difference exceeds a permissible value (.delta.) to thereby arithmetically determine on the basis of the actual and desired imaging magnification values the inter-mask/lens/workpiece distance at which the actual imaging magnification value (M') becomes equal to the desired imaging magnification value (M) for controlling thereby the imaging magnification changing mechanism so that the inter-mask/lens/workpiece distance coincides with the arithmetically determined distance, and a displacement control module for controlling the mask moving mechanism and the workpiece moving mechanism.

Optical processing method and apparatus for carrying out the same

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Tokyo, Japan

Hajime Nakatani