Shin-Etsu Chemical Co., Ltd.

Hajime Nakano

Noriaki Hamaya

Toshihiko Tsukatani

Takao Maeda

Yasushi Takai

Kazuhiro Wataya

Satoshi Shima

Ryo Iwasaki

Hirofumi Kawazoe

Masaru Konya

Takehisa Minowa

Toshihiro Tsumori

Junichi Nakayama

Masami Kaneyoshi

Isamu Fujioka

Yuuichi Makino

Ichiro Uehara

A sprayed coating having a multilayer structure including a lower layer made a sprayed coating containing a rare earth oxide, and a surface layer made of another sprayed coating containing a rare earth fluoride and/or a rare earth oxyfluoride, the multilayered sprayed coating having a volume resistivity at 23° C. and a volume resistivity at 200° C., the volume resistivity at 23° C. being 1×10to 1×10Ω·cm, and a temperature index of the volume resistivities defined by the ratio of the volume resistivity at 200° C. to the volume resistivity at 23° C. being 0.1 to 10.

Sprayed coating, method for manufacturing sprayed coating, sprayed member and spraying material

A sprayed coating having a multilayer structure including a lower layer made a sprayed coating containing a rare earth oxide, and a surface layer made of another sprayed coating containing a rare earth fluoride and/or a rare earth oxyfluoride, the multilayered sprayed coating having a volume resistivity at 23&#xb0; C. and a volume resistivity at 200&#xb0; C., the volume resistivity at 23&#xb0; C. being 1&#xd7;10to 1&#xd7;10&#x3a9;&#xb7;cm, and a temperature index of the volume resistivities defined by the ratio of the volume resistivity at 200&#xb0; C. to the volume resistivity at 23&#xb0; C. being 0.1 to 10.

Provided is a wavelength conversion member in which the following are dispersed in a thermoplastic resin: a LuYAG fluorescent material that is represented by (YLuCe)AlO(in which &#x3b1; is a positive number between 0.3-0.8 inclusive and &#x3b2; is a positive number between 0.01-0.05 inclusive), that emits yellow-green light as a result of excitation by blue light, and that has a diffraction peak within a range in which the diffraction angle 2&#x3b8; in X-ray diffraction by the Kline of Cu is 52.9&#xb0; to 53.2&#xb0; inclusive; and a KSF fluorescent material that is represented by K(SiMn)F(in which x is a positive number between 0.001 and 0.3 inclusive) and that emits red light as a result of excitation by blue light. The content of the KSF fluorescent material in the wavelength conversion member is 1 to 5 times the content of the LuYAG fluorescent material by mass ratio. The wavelength conversion member makes it possible to provide a light-emitting device that has small color deviation, that is suitable as a lighting device, that emits white light, and that has good color rendering properties in a color temperature range of 4,000-6,500K, i.e., the color temperature range from white to daylight color.

Wavelength conversion member and light-emitting device

Provided is a method of producing a Mn-activated complex fluoride phosphor, the method including: mixing a red phosphor as a Mn-activated complex fluoride represented by the following formula (1):KMF:Mn&#x2003;&#x2003;(1)wherein M is one or two or more of tetravalent elements selected from the group consisting of Si, Ti, Zr, Hf, Ge and Sn and necessarily includes Si, with KMnFin solid state and optionally with a hydrogenfluoride represented by the following formula (2):AF.HF&#x2003;&#x2003;(2)wherein A is one or two or more of alkali metals and/or ammonium selected from the group consisting of Li, Na, K, Rb and NHand necessarily includes K, and n is a number of 0.7 to 4, in solid state; and heating the resulting mixture at a temperature of 100 to 500&#xb0; C. According to the present invention, it is possible to obtain a Mn-activated complex fluoride phosphor which can be used with smaller amount as compared to those according to the related art.

Mn-activated complex fluoride phosphor and method of producing thereof

A phosphor-containing resin molded body and a wavelength conversion member, in each of which one or more kinds of spherical phosphors represented by (ABC)CO(wherein A represents one or more rare earth elements selected from among Y, Gd and Lu; B represents one or more rare earth elements selected from among Ce, Nd and Tb; C represents Al and/or Ga; and x, y and z respectively represent positive numbers satisfying 0.002&#x2266;y&#x2266;0.2, 0&#x3c;z&#x2266;2/3 and x+y+z=1) and having an average circularity of 0.3 or less are dispersed in an amount of 0.1-20% by mass; a light emitting device which is provided with the wavelength conversion member; and a resin pellet for phosphor-containing resin molded bodies.

Phosphor-containing resin molded body, light emitting device, and resin pellet

A wafer has a rare earth oxide layer disposed, typically sprayed, on a substrate. It is useful as a dummy wafer in a plasma etching or deposition system.

Wafer

A corrosion resistant member to be exposed to a halogen-containing gas atmosphere or a halogen-containing gas plasma atmosphere, comprising a substrate and a plurality of layers deposited thereon including a layer of rare earth fluoride providing the outermost surface and a layer of rare earth oxide having a porosity of less than 5% underlying the rare earth fluoride layer.

Corrosion resistant multilayer member

A wafer has a rare earth fluoride coating disposed, typically sprayed on a substrate as an outermost layer, the rare earth fluoride being selected from lanthanoid fluorides, yttrium fluoride, and scandium fluoride. It is useful as a dummy wafer in a plasma etching or deposition system.

By using a rare earth metal having a minimal content of impurity metal element, machining it into a member and cleaning with an organic acid-base capping agent, there is obtained a rare earth metal member composed entirely of a rare earth metal and containing not more than 100 ppm of impurity metal element in a sub-surface zone, which member is characterized by a high surface purity, a large grain size, minimized grain boundaries, and improved halogen resistance or corrosion resistance.

Rare earth metal member and making method

An electrically conductive, plasma-resistant member adapted for exposure to a halogen-based gas plasma atmosphere includes a substrate having formed on at least part of a region thereof to be exposed to the plasma a thermal spray coating composed of yttrium metal or yttrium metal in admixture with yttrium oxide and/or yttrium fluoride so as to confer electrical conductivity. Because the member is conductive and has an improved erosion resistance to halogen-based corrosive gases or plasmas thereof, particle contamination due to plasma etching when used in semiconductor manufacturing equipment or flat panel display manufacturing equipment can be suppressed.

Conductive, plasma-resistant member

A Group IIIA element fluoride-containing coating comprising a Group IIIA element fluoride phase which contains at least 50% of a crystalline phase of the orthorhombic system belonging to space group Pnma is formed on a member for imparting corrosion resistance so that the member may be used in a corrosive halogen species-containing atmosphere. When the state of a crystalline phase is properly controlled, the coating experiences only a little color change by corrosion. A Group IIIA element fluoride-containing coating having a micro-Vickers hardness Hv of at least 100 is minimized in weight loss by-corrosion.

Fluoride-containing coating and coated member

The present invention provides a hydrogen absorbing alloy compact for use as the negative electrode of an alkaline rechargeable battery which is made without the aid of a current-collecting support, contains a binder dispersed in the interstices formed by mutual contact of hydrogen absorbing alloy particles and on the alloy surfaces, and has a bulk density of 3.5 to 6.0 g/cm . The present invention also provides a compact electrode which is made by forming a porous hydrogen absorbing alloy compact containing neither current-collecting support nor binder, impregnating the compact with an aqueous solution (or solvent solution) of a binder, and then drying the compact to remove the water (or solvent) alone, so that the strength of the compact is increased and good electrical contact between alloy particles is established.

Hydrogen absorbing alloy compact for use as the negative electrode of an alkaline rechargeable battery

An object of the present invention is to provide a hydrogen absorbing alloy powder for use in the negative electrodes of alkaline rechargeable batteries which has excellent initial characteristics and a high rate discharge property, exhibits satisfactory life characteristics, and is hence very beneficial from a practical point of view, as well as a process for producing the same. Specifically, the present invention provides a hydrogen absorbing alloy powder for use in the negative electrodes of alkaline rechargeable batteries which has an average particle diameter of 5 to 20 &mgr;m and an oxygen content of 2,000 to 6,000 ppm and, moreover, wherein the oxygen on the surfaces of hydrogen absorbing alloy particles is present in the form of hydroxyl groups.

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Echizen, Japan

Hajime Nakano