Canon Kabushiki Kaisha

Hajime Kanazawa

Takayuki Tsukimoto

Akio Atsuta

Jun Ito

Tetsuya Nishio

Hitoshi Mukohjima

Takashi Maeno

Kazuki Fujimoto

Ichiro Chiba

Tokuichi Tsunekawa

Hiroshi Ohmura

Akira Miyake

Yutaka Watanabe

Ichiro Okumura

Kaishi Ohashi

Fumitaro Masaki

Koichi Ueda

Shinichi Koreeda

Kazuyuki Omori

An oscillatory wave motor includes an oscillator having an oscillation body and an electro-mechanical energy-converting element, and a flexible heat-conducting member configured to dissipate heat generated by the oscillatory wave motor. The oscillatory wave motor drives a moving body in contact with a contact portion formed in the oscillation body by an elliptical movement of the oscillator, and the heat-conducting member is provided in addition to a heat-conducting path that conducts heat generated by the oscillatory wave motor through an oscillator supporting member that supports the oscillator or a heat-conducting path that conducts heat through the moving body.

Oscillatory wave motor capable of decreasing degradation of performance

A driving method for a piezoelectric vibrator including a driving piezoelectric element and a detection piezoelectric element formed of the same material as a material of the driving piezoelectric element, for driving the piezoelectric vibrator by applying, to the driving piezoelectric element, an alternating voltage having a frequency close to a resonance frequency of the piezoelectric vibrator, the driving method including, in the case where it is detected based on variations in output detected from the detection piezoelectric element that at least one of variations in mechanical resistance of the piezoelectric vibrator and variations in piezoelectric characteristic of a piezoelectric element have occurred, applying an alternating voltage adjusted in accordance with the variations in mechanical resistance of the piezoelectric vibrator and/or the variations in piezoelectric characteristic of the piezoelectric element, to thereby adjust an electrical input to the piezoelectric vibrator to suppress variations in vibration amplitude of the piezoelectric vibrator.

Driving method for piezoelectric vibrator, and dust removing device and ultrasonic motor using the driving method

Oscillatory wave motor

A light source apparatus for generating a plasma and supplying a light irradiated from the plasma to an optical system, said light source apparatus includes a chamber for accommodating a region that generates the plasma, wherein a density of a hydrocarbon compound included in a gas in the chamber is 300 ppb or less.

Light source apparatus, exposure apparatus and device fabrication method

An exposure apparatus for exposing a pattern of a mask onto an object, said exposure apparatus includes a light source for generating a plasma, said light source including a condenser mirror that condenses a light irradiated from the plasma, an illumination optical system for illuminating the mask using the light condensed by the condenser mirror, a detector that is provided between the condenser mirror and the illumination optical system, said detector detecting a property of the light, and a changing part for changing a state of the plasma based on a detected result of the detector.

Exposure apparatus, light source apparatus and device fabrication

A measuring apparatus for measuring a spectrum of extreme ultraviolet light that diverges from a divergent center point of an extreme ultraviolet light source, includes a spectrum measuring unit that includes a spectrometer and a detector that has a spatial resolution in a spectrum forming direction of the spectrometer, and a drive mechanism that makes the spectrum measuring unit movable relative to the divergent center point.

EUV light spectrum measuring apparatus and calculating method of EUV light intensity

A spectrum measuring apparatus that includes an extinction member for decreasing a light intensity from an EUV light source, a spectrum member for extracting light with a desired wavelength band from the decreased intensity light and a detector for detecting a light intensity of the light with a desired wavelength band is disclosed. Then, a spectrum intensity distribution (spectrum) is obtained by (a) a plural opening is located in the extinction member, and the light from the EUV light source passes through the plural opening at the same time, or (b) the detector detects the light volume of the light with a desired wavelength band as thermal energy.

Spectrum measuring apparatus and method

A vibration type driving apparatus, which is capable of increase of output torque and rotational speed without increasing the size of a vibration body, is described. The apparatus comprises a vibration body which generates vibration by supplying a driving signal to an electro-mechanical energy converting element and a contact body which contacts this vibration body and is moved by vibration received from the vibration body. The vibration body comprises a base portion having the electro-mechanical energy converting element and a plurality of vibration amplification portions for amplifying vibration generated at this base portion. Neighboring vibration amplification portions of the plurality of vibration amplification portions are connected at a position different from a connecting position of each vibration amplification portion with the base portion.

Vibration type driving apparatus

A pencil type vibration wave driven motor includes a vibration member for generating a vibration wave upon energization of a piezo-electric element. The motor further has a compression member for pressing the rotor against the vibration member. The compression member is arranged between the rotor and an output member engaged with the rotor. The output member is supported by a supporting portion provided with the vibration member through a bearing. In this manner, a compression force of the compression member is applied between the rotor and the vibration member without being reduced.

Vibration driven motor

A vibration wave driven motor including a stator, a rotor, and an urging member for causing the stator and the rotor to contact each other under pressure. The urging member is supported by a supporting member at a predetermined position. The supporting member is shiftable in the urging direction of the urging member.

Vibration wave driven motor

A vibration wave driven motor having an electromechanical energy conversion member for generating a vibration wave in an elastic member. This conversion member has first and second surfaces opposite to each other, and first and second surfaces respectively formed on the first and second electrodes to receive an applied electrical signal. The first electrode is formed in a position such as to face one side of the elastic member and has an electrical signal input terminal provided on the second surface side of the conversion member. This input terminal and the first electrode are electrically connected by, for example, a conductor formed in a through hole. It is thereby possible to supply an electric current to each electrode with reliability while maintaining the conversion member and the elastic member in desired close contact with each other.

In an angular velocity detection arrangement, a vibration member excites and detects vibration in different directions and the angular velocity is detected by detecting a vibration in directions other than the direction of a vibration excited by the vibration member.

Angular velocity detection method and angular velocity detection

A vibration wave driven motor having an electro-mechanical energy conversion member for generating a vibration wave in an elastic member. This conversion member has first and second surfaces opposite to each other, and first and second surfaces respectively formed on the first and second electrodes to receive an applied electrical signal. The first electrode is formed in a position such as to face one side of the elastic member and has an electrical signal input terminal provided on the second surface side of the conversion member. This input terminal and the first electrode are electrically connected by, for example, a conductor formed in a through hole. It is thereby possible to supply an electric current to each electrode with reliability while maintaining the conversion member and the elastic member in desired close contact with each other.

A vibration wave device having a resilient member, and electro-mechanical energy conversion means for inducing a travelling vibration wave in the resilient member, the travelling vibration wave being used as a drive source, includes means provided on at least one member of the vibration wave device at a location integer times or approximately integer times 1/2 of the wavelength of a vibration wave which may produce noise and making the dynamic rigidity of the member non-uniform.

Vibration wave motor

In a vibration wave driven motor wherein an AC electric field is applied to an electro-mechanical energy conversion element secured to an elastic member to thereby excite a plurality of standing waves differing in phase from each other in the elastic member and a travelling wave is formed in the elastic member by the combination of the standing waves, whereby a member which is in pressure contact with the elastic member and the elastic member are moved relative to each other by a frictional force, provision is made of means for making the contact pressure on the surface of contact between the elastic member and the member which is in pressure contact with the elastic member non-uniform, and means for making the dynamic rigidity of a vibration member non-uniform in an unnecessary vibration mode created by the means for making the contact pressure non-uniform, whereby the occurrence of noise is prevented by simple and inexpensive means.

Growing community of inventors

Utsunomiya, Japan

Hajime Kanazawa