Rigaku Corporation

Hajime Fujimura

Kazuhiko Omote

Licai Jiang

Shuichi Kato

Boris Verman

Yoshiyuki Kataoka

Masahiro Nonoguchi

Yuriy Platonov

Takashi Yamada

Tsutomu Tada

Makoto Kambe

Toshifumi Higuchi

Provided is a total reflection X-ray fluorescence spectrometer which has high analysis sensitivity and analysis speed. The total reflection X-ray fluorescence spectrometer includes: an X-ray source that has an electron beam focal point having an effective width in a direction parallel to a surface of a sample, and orthogonal to an X-ray irradiation direction, that is larger than a dimension in the irradiation direction; a reflective optic that has an effective width in the orthogonal direction that is larger than that of the electron beam focal point, and has a curved surface in the irradiation direction; and a plurality of detectors that are arranged in a row in the orthogonal direction, and are configured to measure intensities of fluorescent X-rays emitted from the sample irradiated with primary X-rays focused by the reflective optic.

Total reflection x-ray fluorescence spectrometer

A wavelength dispersive X-ray fluorescence spectrometer of the present invention includes: a position sensitive detector () configured to detect intensities of secondary X-rays () at different spectral angles, by using detection elements () corresponding to the secondary X-rays () at different spectral angles; a measured spectrum display unit () configured to display a relationship between a position, in an arrangement direction, of each detection element (), and a detected intensity by the detection element (), as a measured spectrum, on a display (); a detection area setting unit () configured to be set a peak area and a background area; and a quantification unit () configured to calculate, as a net intensity, an intensity of the fluorescent X-rays to be measured, based on a peak intensity in the peak area, a background intensity in the background area, and a background correction coefficient, and to perform quantitative analysis.

Wavelength dispersive x-ray fluorescence spectrometer and x-ray fluorescence analyzing method using the same

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Takatsuki, Japan

Hajime Fujimura