Kokusai Electric Corporation

Hitachi-Kokusai Electric Inc.

Hajime Abiko

Junichi Kawasaki

Tomoyuki Miyada

Tadashi Okazaki

Yukinao Kaga

There is provided a configuration that includes a substrate holder configured to hold substrates; a transfer mechanism configured to transfer the substrates to the substrate holder; and a controller configured to: acquire a number of substrates mountable on the substrate holder and a number of the product substrates to be mounted on the substrate holder; divide the product substrates into product substrate groups; divide the dummy substrates into dummy substrate groups based on the number of the product substrates, the number of the substrates mountable on the substrate holder, and a number of the product substrate groups; combine the product substrate groups and the dummy substrate groups; create substrate arrangement data for distributing and mounting the product substrates on the substrate holder; and cause the transfer mechanism to transfer the substrates according to the substrate arrangement data.

Substrate processing apparatus and recording medium

Described herein is a technique capable of detecting a substrate state without contacting the substrate. According to one aspect of the technique, there is provided (a) loading a substrate retainer, where a plurality of substrates is placed, into a reaction tube; (b) processing the plurality of the substrates by supplying a gas into the reaction tube; (c) unloading the substrate retainer out of the reaction tube after the plurality of the substrates is processed; and (d) detecting the plurality of the substrates placed on the substrate retainer after the substrate retainer is rotated by a first angle with respect to a transferable position, wherein the plurality of the substrates is transferable to/from the substrate retainer in the transferable position.

Method of manufacturing semiconductor device and non-transitory computer-readable recording medium

A substrate processing apparatus includes a substrate retaining mechanism; a detecting unit detecting a placed state of the substrate retained by the substrate retaining mechanism; a first determination unit comparing detection data of the substrate obtained by the detecting unit with master data that is a reference to determine if the detection data is within a first allowed value; a confirmation unit confirming substrate type; a second determination unit comparing the detection data of the substrate with the master data to determine if the detection data is within a second allowed value; and a transfer control unit controlling the substrate retaining mechanism depending on a determination result of the second determination unit when substrate type is confirmed as a predetermined type by the confirmation unit when it is determined that the detection data is not within the first allowed value as determined by the first determination unit.

Substrate processing apparatus

A substrate processing apparatus includes a substrate retaining mechanism into which retaining members on which substrates are placed are installed to retain the substrates; a substrate transfer unit configured to transfer at least one substrate; a detecting unit configured to detect states of the retaining members installed into the substrate retaining mechanism; a determination unit configured to compare data representing the states of the retaining members, which is obtained by the detecting unit, with master data, which is reference data obtained by detecting normal states of the retaining members, beforehand to determine the states of the retaining members; and a transfer control unit configured to control the substrate transfer unit according to the determination of the determination unit.

Growing community of inventors

Toyama, Japan

Hajime Abiko