University of Virginia Patent Foundation

Haiyong Xu

Robert M Weikle, Ii

Arthur Weston Lichtenberger

Nicolas Scott Barker

Theodore James Reck

Lihan Chen

Ii Robert M Weikle

A micromachining process to fabricate a single chip that simple drops into a supporting structure. The micromachining process provides the ability to create a probe that will interface with integrated circuits, for example, operating at frequencies in the range of about 100 GHz to about 3,000 GHz (3 THz). This approach creates a silicon structure (or other applicable choice of material) that provides mechanical force for probing while supporting the transfer of the high frequency energy between a measurement system and the integrated circuit, individual device or material.

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Charlottesville, VA, United States of America

Haiyong Xu