Applied Materials Israel Limited

Carl Zeiss Microscopy Gmbh

Lambda Crossing, Ltd.

Carl Zeiss Smt Gmbh

Haim Eder

Binyamin Kirshner

Moti Margalit

Yoav Berlatzky

Nissim Elmaliach

Ido Kofler

Jacob Scheuer

Michael Rudman

Hagay Famini

Yoav Yadin

Igor Krayvitz (Krivts)

Seffi Sadeh

Mario Mützel

Mario MÜTZEL

Igor Krayvits

Apparatus for detecting optical radiation emitted from an array of spots on an object. The apparatus includes a plurality of light guides having respective input ends and output ends, with the input ends ordered in a geometrical arrangement corresponding to the array of the spots. Relay optics collect and focus the optical radiation from the object onto the input ends such that each input end receives the optical radiation from a corresponding one of the spots. Multiple detectors and each coupled to receive the optical radiation from an output end of a respective one of the light guides.

Multi-spot collection optics

A beam shaping system including: a first and second optical modules that are accommodated in a spaced-apart relationship in an optical path of light through the system to sequentially apply beam shaping to light incident thereon. The beam shaping system includes first and second alignment modules respectively carrying the first and second optical modules and operable for laterally positioning the optical modules with respect to the optical path. A calibration module of the beam shaping system is connectable to the first and second alignment modules and is operable to sequentially calibrate and align the respective lateral positions of the first and second optical modules with respect to the optical path. The system thereby enables shaping of an incoming light beam of given predetermined wave-front and lateral intensity distribution to form an output light beam having desired wave-front and desired lateral intensity distribution.

Calibratable beam shaping system and method

A spatial beam shaper structure and a corresponding optical system are provided. The spatial beam shaper structure comprises a light collecting surface configured for affecting light impinging thereon to provide a substantially smooth light profile of at least one optical property, the light collecting surface having a pattern in the form of multiple surface regions comprising regions of at least two different optical properties arranged in an alternating fashion, wherein an interface region between each two locally adjacent regions of the different optical properties has the at least two different optical properties, to provide substantially smooth transition of said different optical properties within the interface region.

Optical element for spatial beam shaping

A filter device and method are presented for filtering a multi-channel randomly polarized light signal to separate therefrom at least one specific channel. The device comprises a polarizer assembly, and a filter structure. The polarizer assembly is operable for processing the multi-channel randomly polarized light signal to split it into two multi-channel light components of a predetermined polarization identical for both of said two multi-channel light components; and for processing two identically polarized light components to produce a randomly polarized light signal. The filter structure is operable to process said two multi-channel light components of said predetermined polarization to select from each of said two light components the specific channel, and thereby produce two first output light components of the specific channel propagating through spatially separated first light paths.

Polarization insensitive tunable optical filters

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Kiryat Ono, Israel

Haim Eder