Kla Tencor Corporation

Kla Corporation

Haijing Peng

Walter H Johnson, Iii

Lansheng Dong

Jun Wang

Shankar Krishnan

David Y Wang

Jianou Shi

Yang Zhou

Hai-Yang You

Chunxia Li

Changfei Yan

Rui Ni

Nanchang Zhu

Xianghua Liu

Zhuoxian Zhang

Yaolei Zheng

Alex Zheng

Jiazhou Jin

A Cassegrain or quasi-Cassegrain structure objective lens is used in a polar MOKE metrology system. The quasi-Cassegrain reflective objective lens includes a primary concave mirror and a secondary mirror. The primary concave mirror has a wider diameter than the secondary mirror and defines an aperture through which the laser beam is configured to be transmitted toward the secondary mirror. The secondary mirror can be convex, concave, or have a flat surface.

Reflective compact lens for magneto-optic Kerr effect metrology system

A laser beam is directed through a transmissive axicon telescope or a reflective axicon telescope such as in a magneto-optic Kerr effect metrology system. With the transmissive axicon telescope, a Gaussian beam profile is directed through a first axicon lens and a second axicon lens. The first axicon lens and second axicon lens transfer the Gaussian beam profile of the laser beam to a hollowed laser ring. The laser beam with a hollowed laser ring can be directed through a Schwarzschild reflective objective. With the reflective axicon telescope, the laser beam is directed through two conical mirrors that are fully reflective. One of the conical mirrors defines a central hole that the laser beam passes through.

Magneto-optic Kerr effect metrology systems

A continuous variable spacing probe pin device, including first and second probe pins. The first and second probe pins are configured to measure a property of a conductive layer. In a first configuration, the first and second probe pins include respective first portions arranged to contact the conductive layer to measure the property. In a second configuration, the first and second probe pins include respective second portions arranged to contact the conductive layer to measure the property. A first area for each respective first portion is different from a second area for each respective second portion.

Variable spacing four-point probe pin device and method

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Shanghai, China

Haijing Peng