Shanghai Micro Electronics Equipment (Group) Co., Ltd.

Haijiang Wang

Xinghai Wang

Mingbo Yuan

Jiming Fan

A device and method for measuring amplitude of a scanning mirror are disclosed. The device includes a light source () for outputting an optical signal; a diaphragm () for modifying size and shape of a light spot of the optical signal output by the light source (); a scanning mirror retainer for placing a scanning mirror () to be measured, the scanning mirror, after being retained, being able to periodically reflect the optical signal; a photoelectric sensor () including three or more sensing elements and configured to detect and collect the optical signal reflected by the scanning mirror (); and a signal acquisition and processing unit () for processing a signal collected by the photoelectric sensor () to derive an amplitude of the scanning mirror (). Therefore, it is possible to characterize the scanning mirror () before the scanning mirror () is used, determining performance of the scanning mirror ().

Apparatus and method for measuring amplitude of scanning reflector

A scanning mirror monitoring system and method as well as a focusing and leveling system are disclosed. The scanning mirror monitoring system includes a simple harmonic motion detector unit and a signal processing unit (). The simple harmonic motion detector unit monitors a simple harmonic motion of a scanning mirror () and produces a simple harmonic signal. The signal processing unit () receives the simple harmonic signal and instructs a scanning mirror actuator unit () to adjust the amplitude and/or position of the scanning mirror () based on a variation found in the simple harmonic signal. The signal processing unit () identifies the variation by monitoring an optical intensity profile.

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Shanghai, China

Haijiang Wang